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Analytical model to predict temperature distribution and ablation depth in excimer laser micromachining

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Abstract

An analytical model to predict the temperature distribution and ablation depth in excimer laser ablation process by solving one-dimensional heat conduction equation has been proposed. The model takes into account aspects like temperature dependent thermal properties for polycarbonate material and re-solidification during pulse off-time. The effects of fluence and number of pulses with and without consideration to the temperature dependent thermal conductivity and pulse delay have been investigated. It is observed that consideration to temperature dependent thermal conductivity and re-solidification during pulse ‘off-time’ results in an appreciable improvement in the accuracy of ablation depth prediction and the error being within ± 0.8 μm.

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Abbreviations

λ l :

Thermal diffusivity of liquid region, m2/s

λ s :

Thermal diffusivity of solid region, m2/s

k s :

Thermal conductivity of solid region, W/mK

k l :

Thermal conductivity of liquid region, W/mK

A s :

Aborptivity of solid region

A l :

Aborptivity of liquid region

R:

Reflectivity

L :

Latent heat, cal/g

T m :

Melting temperature of substrate, K

T v :

Vaporization temperature of substrate, K

T o :

Ambient temperature, K

ρ s :

Density of solid region, kg/m3

ρ l :

Density of liquid region, kg/m3

S (t) :

Position of interface between solid and liquid regions

δ l(t) :

Temperature penetration depth in liquid region

δ s(t) :

Temperature penetration depth in solid region

T w (t) :

Temperature at the surface, K

I :

Laser intensity, W/m2

t m :

Time required to reach melting temperature, s

c ps :

Specific heat of solid region, J/kg K

c pl :

Specific heat of Liquid region, J/kg K

x i :

Shift in interface location

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Authors and Affiliations

  1. Department of Mechanical Engineering, Indian Institute of Technology Bombay, Powai, Mumbai, Maharashtra, India, 400076

    Deepak Marla, Vishal Barde & Suhas Sitaram Joshi

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  1. Deepak Marla
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  2. Vishal Barde
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  3. Suhas Sitaram Joshi
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Correspondence to Suhas Sitaram Joshi.

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Marla, D., Barde, V. & Joshi, S.S. Analytical model to predict temperature distribution and ablation depth in excimer laser micromachining. Int. J. Precis. Eng. Manuf. 14, 29–36 (2013). https://doi.org/10.1007/s12541-013-0005-2

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  • DOI: https://doi.org/10.1007/s12541-013-0005-2

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