Nano Research

, Volume 9, Issue 4, pp 1071–1078

Mass transport phenomena in copper nanowires at high current density

  • Yu-Ting Huang
  • Chun-Wei Huang
  • Jui-Yuan Chen
  • Yi-Hsin Ting
  • Shao-Liang Cheng
  • Chien-Neng Liao
  • Wen-Wei Wu
Research Article

DOI: 10.1007/s12274-016-0998-9

Cite this article as:
Huang, YT., Huang, CW., Chen, JY. et al. Nano Res. (2016) 9: 1071. doi:10.1007/s12274-016-0998-9
  • 171 Downloads

Abstract

Electromigration in Cu has been extensively investigated as the root cause of typical breakdown failure in Cu interconnects. In this study, Cu nanowires connected to Au electrodes are fabricated and observed using in situ transmission electron microscopy to investigate the electro- and thermo-migration processes that are induced by direct current sweeps. We observe the dynamic evolution of different mass transport mechanisms. A current density on the order of 106 A/cm2 and a temperature of approximately 400 °C are sufficient to induce electro- and thermo-migration, respectively. Observations of the migration processes activated by increasing temperatures indicate that the migration direction of Cu atoms is dependent on the net force from the electric field and electron wind. This work is expected to support future design efforts to improve the robustness of Cu interconnects.

Keywords

Cu interconnect nanowires electromigration thermomigration mass transport high current density 

Supplementary material

12274_2016_998_MOESM1_ESM.pdf (1.3 mb)
Supplementary material, approximately 1.31 MB.
12274_2016_998_MOESM2_ESM.avi (3.7 mb)
Supplementary material, approximately 3.73 MB.
12274_2016_998_MOESM3_ESM.avi (2.1 mb)
Supplementary material, approximately 2.11 MB.
12274_2016_998_MOESM4_ESM.avi (257 kb)
Supplementary material, approximately 260 KB.

Copyright information

© Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2016

Authors and Affiliations

  • Yu-Ting Huang
    • 1
  • Chun-Wei Huang
    • 1
  • Jui-Yuan Chen
    • 1
  • Yi-Hsin Ting
    • 1
  • Shao-Liang Cheng
    • 2
  • Chien-Neng Liao
    • 3
  • Wen-Wei Wu
    • 1
  1. 1.Department of Materials Science and EngineeringChiao Tung UniversityHsinchuChina
  2. 2.Department of Chemical and Materials EngineeringCentral UniversityTaoyuanChina
  3. 3.Department of Materials Science and EngineeringTsing Hua UniversityHsinchuChina

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