Open Access
Research Article

Nano Research

, Volume 2, Issue 6, pp 509-516

Growth of large-area single- and Bi-layer graphene by controlled carbon precipitation on polycrystalline Ni surfaces

Authors

  • Alfonso Reina
    • Department of Materials Science and EngineeringMassachusetts Institute of Technology
  • Stefan Thiele
    • Institut für Physik and Institut für Mikro- und NanotechnologienTechnische Universität Ilmenau
  • Xiaoting Jia
    • Department of Materials Science and EngineeringMassachusetts Institute of Technology
  • Sreekar Bhaviripudi
    • Department of Electrical Engineering and Computer ScienceMassachusetts Institute of Technology
  • Mildred S. Dresselhaus
    • Department of Electrical Engineering and Computer ScienceMassachusetts Institute of Technology
    • Department of PhysicsMassachusetts Institute of Technology
  • Juergen A. Schaefer
    • Institut für Physik and Institut für Mikro- und NanotechnologienTechnische Universität Ilmenau
  • Jing Kong
    • Department of Electrical Engineering and Computer ScienceMassachusetts Institute of Technology

DOI: 10.1007/s12274-009-9059-y

Abstract

We report graphene films composed mostly of one or two layers of graphene grown by controlled carbon precipitation on the surface of polycrystalline Ni thin films during atmospheric chemical vapor deposition (CVD). Controlling both the methane concentration during CVD and the substrate cooling rate during graphene growth can significantly improve the thickness uniformity. As a result, one- or two- layer graphene regions occupy up to 87% of the film area. Single layer coverage accounts for 5%–11% of the overall film. These regions expand across multiple grain boundaries of the underlying polycrystalline Ni film. The number density of sites with multilayer graphene/graphite (>2 layers) is reduced as the cooling rate decreases. These films can also be transferred to other substrates and their sizes are only limited by the sizes of the Ni film and the CVD chamber. Here, we demonstrate the formation of films as large as 1 in2. These findings represent an important step towards the fabrication of large-scale high-quality graphene samples.

https://static-content.springer.com/image/art%3A10.1007%2Fs12274-009-9059-y/MediaObjects/12274_2009_9059_Fig1_HTML.jpg

Keywords

Graphene chemical vapor deposition nickel catalyst carbon nanomaterials

Supplementary material

12274_2009_9059_MOESM1_ESM.pdf (632 kb)
Supplementary material, approximately 636 KB.

Copyright information

© Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2009