Abstract
In this paper we demonstrate coordinated control of multiple micromanipulators for use in 2D and 3D micromanipulation tasks. We develop a feature-defined (FD) micro-caging transport primitive for 2D micromanipulation and use a similar methodology to extend it to the 3D case. Simultaneous movements of the coordinated micromanipulators allow for both 2D planar micro-caging grasps and micro-force closure grasps suitable for 3D micro-transporting tasks. Experimental results illustrate the success and accuracies of both the 2D and 3D methodologies. The new transport primitives are used in conjunction with our previous micromanipulation primitives and coordinated XY stage movements to semi-autonomously execute a number of representative 2D and 3D micromanipulation tasks.
Similar content being viewed by others
References
Cecil J, Vasquez D, Powell D (2005) A review of gripping and manipulation techniques for micro-assembly applications. Int J Prod Res 43(4):819–828
Savia M, Koivo H (2009) Contact micromanipulation-survey of strategies. IEEE/ASME Trans Mechatron 14(4):504–514
Feddema J, Xavier P, Brown R (1999) Micro-assembly planning with van der Waals force. In: Proceedings of the IEEE international symposium on assembly and task planning (ISATP ’99), pp 32–38
Zhou Y, Nelson B (2000) The effect of material properties and gripping force on micrograsping. In: Proceedings of the IEEE international conference on robotics & automation (ICRA), San Francisco, CA
Keller C (1998) Microgrippers with integrated actuator and force sensors. In: Proceedings of the world automation congress, pp 217–222
Cecil J, Gobinath N (2005) Development of a virtual and physical work cell to assemble micro-devices. Robot Comput-Integr Manuf 21(4–5):431–441. doi:10.1016/j.rcim.2004.11.014
Alex J, Vikramaditya B, Nelson B (1998) A virtual reality teleoperator interface for assembly of hybrid MEMS prototypes. In: Proceedings of DETC’98 1998 ASME engineering technical conference, Atlanta, GA, 13–16 Sept 1998
Kasaya T, Miyazaki H, Saito S, Sato T (1999) Micro object handling under SEM by vision-based automatic control. In: Proceedings of the IEEE international conference on robotics and automation, Detroit, MI, pp 2189–2196
Das A, Zhang P, Lee W, Popa D, Stephanou H (2007) μ 3: multiscale, deterministic micro-nano assembly system for construction of on-wafer microrobots. In: IEEE international conference on robotics and automation (ICRA), Rome, Italy
Moll M, Goldberg K, Erdmann M, Fearing R (2002) Orienting micro-scale parts with squeeze and roll primitives. In: IEEE int. conf. on robotics and automation, Washington, DC, 11–15 May 2002
Fearing R (1995) Survey of sticking effects for micro parts handling. In: IEEE/RSJ int. conf. on intelligent robotics and sys. (IROS), Pittsburgh, PA, vol 2, pp 212–217, 5–9 Aug 1995
Boehringer K, Fearing R, Goldberg K (1999) Handbook of industrial robotics, 2nd edn. Wiley, ch. Microassembly, pp 1045–1066
Rougeot P, Regnier S, Chaillet N (2005) Forces analysis for micro-manipulation. In: 2005 IEEE international symposium on computational intelligence in robotics and automation, 2005. CIRA 2005. Proceedings, pp 105–110
Yang G, Gaines J, Nelson B (2001) A flexible experimental workcell for efficient and reliable wafer-level 3d micro-assembly. In: IEEE international conference on robotics and automation, 2001. Proceedings 2001 ICRA, vol 1, pp 133–138
Dechev N, Cleghorn W, Mills J (2003) Microassembly of 3d mems structures utilizing a mems microgripper with a robotic manipulator. In: IEEE international conference on robotics and automation, 2003. Proceedings, ICRA ’03, vol 3, pp 3193–3199
Dechev N, Cleghorn W, Mills J (2004) Microassembly of 3-d microstructures using a compliant, passive microgripper. J Microelectromech Syst 13(2):176–189
Dechev N, Ren L, Liu W, Cleghorn L, Mills J (2006) Development of a 6 degree of freedom robotic micromanipulator for use in 3d mems microassembly. In: Proceedings 2006 IEEE international conference on robotics and automation, 2006. ICRA 2006, pp 281–288
Wang L, Ren L, Mills J, Cleghorn W (2007) Automatic 3d joining in microassembly. In: International conference on information acquisition, 2007. ICIA ’07, pp 292–297
Popa D, Lee WH, Murthy R, Das A, Stephanou H (2007) High yield automated mems assembly. In: IEEE international conference on automation science and engineering, 2007. CASE 2007, pp 1099–1104
Ren L, Wang L, Mills J, Sun D (2007) 3-d automatic microassembly by vision-based control. In: IEEE/RSJ international conference on intelligent robots and systems, 2007. IROS 2007, pp 297–302
Rabenorosoa K, Clevy C, Lutz P, Bargiel S, Gorecki C (2009) A micro-assembly station used for 3d reconfigurable hybrid moems assembly. In: IEEE international symposium on assembly and manufacturing, 2009, ISAM 2009, pp 95–100
Tamadazte B, Le Fort-Piat N, Dembele S, Marchand E (2009) Microassembly of complex and solid 3d mems by 3d vision-based control. In: IEEE/RSJ international conference on intelligent robots and systems, 2009. IROS 2009, pp 3284–3289
Tamadazte B, Arnould T, Dembele S, Le Fort-Piat N, Marchand E (2009) Real-time vision-based microassembly of 3d mems. In: IEEE/ASME international conference on advanced intelligent mechatronics, 2009. AIM 2009, pp 88–93
Hui E, Howe R, Rodgers M (2000) Single-step assembly of complex 3-d microstructures. In: The 13th annual international conference on micro electro mechanical systems, 2000. MEMS 2000, pp 602–607
Paik JK, Kramer RK, Wood RJ (2011) Stretchable circuits and sensors for robotic origami. In: 2011 IEEE/RSJ international conference on intelligent robots and systems (IROS), pp 414–420
Sariola V, Zhou Q, Koivo HN (2009) Three dimensional hybrid microassembly combining robotic microhandling and self-assembly. In: IEEE international conference on robotics and automation, 2009. ICRA ’09, pp 2605–2610
Calin M, Chaillet N, Agnus J, Bourjault A (1997) Design of cooperative microrobots with impedance optimization. In: Proceedings of the 1997 IEEE/RSJ international conference on intelligent robots and systems, 1997. IROS ’97, vol 3, pp 1312–1317
Helin P, Calin M, Sadaune V, Chaillet N, Druon C, Bourjault A (1997) Micro-conveying station for assembly of micro-components. In: Proceedings of the 1997 IEEE/RSJ international conference on intelligent robots and systems, 1997. IROS ’97, vol 3, pp 1306–1311
Krishnan S, Saggere L (2007) A multi-fingered micromechanism for coordinated micro/nano manipulation. J Micromech Microeng 17:576–585
Huang X, Lv X, Wang M (2006) Development of a robotic microassembly system with multi-manipulator cooperation. In: Proceedings of the 2006 IEEE international conference on mechatronics and automation, pp 1197–1201
Murthy R, Das A, Popa D (2006) Multiscale robotics framework for mems assembly. In: 9th international conference on control, automation, robotics and vision, 2006. ICARCV 06, pp 1–6
Das A, Murthy R, Popa D, Stephanou H (2012) A multiscale assembly and packaging system for manufacturing of complex micro-nano devices. IEEE Trans Autom Sci Eng 9(1):160–170
Wason J, Wen J, Choi Y-M, Gorman J, Dagalakis N (2010) Vision guided multi-probe assembly of 3d microstructures. In: 2010 IEEE/RSJ international conference on intelligent robots and systems (IROS), pp 5603–5609
Wason J, Wen J, Dagalakis N (2011) Dextrous manipulation of a micropart with multiple compliant probes through visual force feedback. In: 2011 IEEE international conference on robotics and automation (ICRA), pp 5991–5996
Bolopion A, Xie H, Haliyo D, Regnier S (2012) Haptic teleoperation for 3-d microassembly of spherical objects. IEEE/ASME Trans Mechatron 17(1):116–127
Xie H, Haliyo D, Regnier S (2009) A versatile atomic force microscope for three-dimensional nanomanipulation and nanoassembly. Nanotechnology 20(21):215301-1–215301-9
Kosuge K, Hirata Y, Kaetsu H, Kawabata K (1999) Motion control of multiple autonomous mobile robots handling a large object in coordination. In: IEEE int. conf. on robotics and automation, pp 2666–2673
Rus D (1997) Coordinated manipulation of objects in a plane. Algorithmica 19(1):129–147
Sugar T, Kumar V (1999) Multiple cooperating mobile manipulators. In: IEEE int. conf. on robotics and automation, pp 1538–1543
Mataric M, Nilsson M, Simsarian K (1995) Cooperative multi-robot box-pushing. In: IEEE/RSJ int. conf. on intelligent robots and systems, pp 556–561
Lynch K, Mason M (1996) Stable pushing: mechanics, controllability, and planning. Int J Rob Res 15(6):553–556
Pereira G, Kumar V, Campos M (2004) Decentralized algorithms for multi-robot manipulation via caging. Int J Rob Res (7/8):783–795
Fink J, Hsieh MA, Kumar V (2008) Multi-robot manipulation via caging in environments with obstacles. In: 2008 IEEE international conference on robotics and automation, Pasedena, CA
Fink J, Michael N, Kumar V (2007) Composition of vector fields for multi-robot manipulation via caging. In: Proceedings of robotics: science and systems III, Atlanta, GA
Cappelleri D, Fink J, Mukundakrishnan B, Kumar V, Trinkle J (2006) Designing open-loop plans for planar micro-manipulation. In: IEEE int. conf. on robotics and automation, Orlando, FL
Cheng P, Cappelleri D, Gavrea B, Kumar V (2007) Planning and control of meso-scale manipulation tasks with uncertainties. In: Proceedings of robotics: science and systems, Atlanta, GA, USA
Cappelleri D, Peng C, Fink J, Gavrea B, Kumar V (2011) Automated assembly for meso-scale parts. IEEE Trans Autom Sci Eng 8(3):598–613
Cheng P, Fink J, Kumar V (2008) Abstractions and algorithms for cooperative multiple robot planar manipulation. In: Proceedings of robotics: science and systems IV, Zurich, Switzerland
Mason M (1982) Manipulator grasping and pushing operations. PhD dissertation, Massachusetts Institute of Technology
Mason M (1986) Mechanics and planning of manipulator pushing operations. Int J Rob Res 5(3):53–71
Peshkin M, Sanderson A (1985) The motion of a pushed, sliding object, part 1: sliding friction. Robotics Institute, Carnegie Mellon University, Pittsburgh, PA, Tech. Rep. CMU-RI-TR-85-18
Song P, Pang J, Kumar V (2004) A semi-implicit timestepping model for frictional compliant contact problems. Int J Numer Methods Eng 60:2231–2261
Trinkle J, Berard S, Pang J (2005) A time-stepping scheme for quasistatic multibody systems. In: International symposium of assembly and task planning
Cappelleri D, Fatovic M, Shah U (2011) Caging micromanipulation for automated microassembly. In: Proceedings of the IEEE international conference on robotics and automation, Shanghai, China
Spong M, Hutchinson S, Vidyasagar M (2006) Robot modeling and control. Wiley, Hoboken
Cappelleri DJ, Fatovic M, Fu Z (2011) Caging grasps for micromanipulation amp; microassembly. In: 2011 IEEE/RSJ international conference on intelligent robots and systems (IROS), pp 925–930
Acknowledgements
Part of this work was supported by US Navy/Office of Naval Research Contract # N00014-11-M-0275. The authors would like to thank Wuming Jing for his help with manufacturing the micro-parts and test fixtures. We also acknowledge the Micro-Devices Laboratory at Stevens Institute of Technology, Prof. E.H. Yang and Dr. Seongjin Jang for providing the fabrication facility and required equipment training needed for this project.
Author information
Authors and Affiliations
Corresponding author
Rights and permissions
About this article
Cite this article
Cappelleri, D.J., Fu, Z. & Fatovic, M. Caging for 2D and 3D micromanipulation. J. Micro-Nano Mech. 7, 115–129 (2012). https://doi.org/10.1007/s12213-012-0050-4
Received:
Revised:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s12213-012-0050-4