Journal of Micro-Nano Mechatronics

, 4:159

Hybrid linear microactuators and their control models for mirror shape correction


  • Kirill Shcheglov
    • Sensors in Motion Inc.
  • Xiaoning Jiang
    • TRS Technologies, Inc.
  • Risaku Toda
    • Jet Propulsion LaboratoryCalifornia Institute of Technology
  • Zensheu Chang
    • Jet Propulsion LaboratoryCalifornia Institute of Technology
    • Stevens Institute of TechnologyCastle Point on the Hudson
Research Paper

DOI: 10.1007/s12213-009-0017-2

Cite this article as:
Shcheglov, K., Jiang, X., Toda, R. et al. J. Micro-Nano Mech. (2008) 4: 159. doi:10.1007/s12213-009-0017-2


Future space-based imaging systems demand ultra-lightweight mirrors, which would involve a large number of actuators to provide the needed surface correction. These lightweight actuators are required to be integrated with the mirrors to avoid a significant increase in overall areal mass density. This paper presents the fabrication and testing of a linear microactuator and the modeling of an actuated mirror composed of such lightweight actuators. The linear microactuator is driven by a combination of a piezoelectric actuator block and electrostatic comb drive units. A full nonlinear optimization model of a mirror lattice was developed to simulate a lightweight primary with embedded microactuators, which allows for an arbitrarily connected lattice with connector elements having an arbitrary stiffness and actuation response. The modeling yielded a high precision estimation of the mirror shape correction.


Linear actuatorAdaptive opticsLarge strokeBulk-micromachiningActive shape correctionSegmented mirror

Copyright information

© Springer-Verlag 2009