Research Paper

Journal of Micro-Nano Mechatronics

, 4:159

First online:

Hybrid linear microactuators and their control models for mirror shape correction

  • Kirill ShcheglovAffiliated withSensors in Motion Inc.
  • , Xiaoning JiangAffiliated withTRS Technologies, Inc.
  • , Risaku TodaAffiliated withJet Propulsion Laboratory, California Institute of Technology
  • , Zensheu ChangAffiliated withJet Propulsion Laboratory, California Institute of Technology
  • , Eui-Hyeok YangAffiliated withStevens Institute of Technology, Castle Point on the Hudson Email author 

Rent the article at a discount

Rent now

* Final gross prices may vary according to local VAT.

Get Access


Future space-based imaging systems demand ultra-lightweight mirrors, which would involve a large number of actuators to provide the needed surface correction. These lightweight actuators are required to be integrated with the mirrors to avoid a significant increase in overall areal mass density. This paper presents the fabrication and testing of a linear microactuator and the modeling of an actuated mirror composed of such lightweight actuators. The linear microactuator is driven by a combination of a piezoelectric actuator block and electrostatic comb drive units. A full nonlinear optimization model of a mirror lattice was developed to simulate a lightweight primary with embedded microactuators, which allows for an arbitrarily connected lattice with connector elements having an arbitrary stiffness and actuation response. The modeling yielded a high precision estimation of the mirror shape correction.


Linear actuator Adaptive optics Large stroke Bulk-micromachining Active shape correction Segmented mirror