Skip to main content
Log in

Optimization of nanocrystalline γ-alumina coating for direct spray water-cooling of optical devices

  • Published:
Bulletin of Materials Science Aims and scope Submit manuscript

Abstract

In this study, aluminium oxide films were deposited on BK7 glass substrates using radio frequency magnetron sputtering. The purposes of this study are to clarify the influence of O 2 flow as reactive partial gas, which is necessary to form Al2O3 films, and then the influence of substrate temperature on structure and rigidity of coatings towards water injection. The fabricated metal oxide films were characterized using techniques such as atomic force microscopy (AFM), X-ray diffraction (XRD), spectrophotometry, ellipsometry and Rutherford backscattering (RBS) analysis. Modifications of the partial gas percentage influences the optical properties and composition of the deposited aluminium oxide, the best samples being those deposited with 5% and 8% oxygen. The substrate temperature affects the structure and crystallization of the films. Nanocrystalline γ-Al2O3 has been observed at temperatures above 300 °C with the grain size of 25nm. After water injection, there was a large diversity in the surface roughness of samples with different substrate temperature. Experiments have shown that the best resistance against water injection occurs for the sample deposited at 350 °C with 5% partial gas. We conclude that the rigidity of nanocrystalline γ-Al2O3 coatings can be explained by both Hall-Petch and Coble creep mechanism. In this case, there is an optimum grain size of around 42 nm against water spray.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Figure 1
Figure 2
Figure 3
Figure 4
Figure 5
Figure 6
Figure 7
Figure 8

Similar content being viewed by others

References

  • Bahlawane N and Watanabe T 2000 J. Am. Ceram. Soc. 83 2324

  • Bar-Cohen A, Arik M and Ohadi M 2006 Proc. IEEE 94 1549

  • Blennow P, Hansen K K, Wallenberg L R and Mogensen M 2008 ECS Transactions 13 181

  • Borchert H, Shevchenko E V and Robert A 2005 Langmuir 21 1931

  • Carlton C E and Ferreira P J 2007 Acta Mater. 55 3749

  • Chokshi A H, Rosen A, Karch J and Gleiter H 1989 Scripta Metall. Mater. 23 1679

  • Chupas P J, Ciraolo M F, Hanson J C and Grey C P 2001 J. Am. Chem. Soc. 123 1694

  • Groner M D, Elam J W, Fabreguette F H and George S M 2002 Thin Solid Films 413 186

  • Groner M D, Fabreguette F H, Elam J W and George S M 2004 Chem. Mater. 16 639

  • Guerrero P J and Jaramillo V D 1999 Nanostruct. Mater. 11 1195

  • Hidrovo C and Goodson K E 2008 Electrical, optical and thermal interconnections for 3D integrated systems (eds) J Meindl and M Bakir (Boston: Artech) p 293

  • Hoffman D and Leibowitz D 1971 J. Vac. Sci. Technol. 8 107

  • Jia W and Qiu H-H 2003 Exp. Therm. Fluid Sci. 27 829

  • Jin P, Nakao S, Wang S X and Wang L M 2003 Appl. Phys. Lett. 82 1024

  • Klie R F, Browning N D, Chowdhuri A R and Takoudis C G 2003 Appl. Phys. Lett. 83 1187

  • Larijani M M, Norouzian S, Afzalzadeh R, Balashabadi P and Dibaji H 2009 Surf. Coat. Tech. 203 2486

  • Meyers M A, Mishra A and Benson D J 2006 Prog. Mater. Sci. 51 427

  • Ortiz A, Alonso J C, Pankov V, Huanosta A and Andrade E 2000 Thin Solid Films 368 74

  • Patterson A L 1939 Phys. Rev. 56 978

  • Ritala M, Leskelä M, Dekker J P, Mutsaers C, Soininen P J and Skarp J 1999 Chem. Vap. Depos. 5 7

  • Rozita R, Brydson R and Scott A J 2010 J. Phys.: Conference Series 241 012096

  • Takeuchi S 2001 Scripta Mater. 44 1483

  • Treusch G, Srinivasan R, Brown D, Miller R and Harrison J 2005 Proc. SPIE (Bellingham, WA: SPIE) 5711

  • Wang N, Wang Z, Aust K T and Erb U 1995 Acta Metall. Mater. 43 519

  • Weber M J 2003 Handbook of optical materials (Berkeley, California: CRC Press)

  • Weiwei D and Gomez A 2011 Int. J. Heat Mass Tran. 54 2270

  • Zywistzki O and Hoetzsch G 1996 Surf. Coat. Tech. 86 640

Download references

Author information

Authors and Affiliations

Authors

Corresponding author

Correspondence to S N ALAM.

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

ALAM, S.N., ANARAKY, M., SHAFEIZADEH, Z. et al. Optimization of nanocrystalline γ-alumina coating for direct spray water-cooling of optical devices. Bull Mater Sci 37, 1583–1588 (2014). https://doi.org/10.1007/s12034-014-0716-8

Download citation

  • Received:

  • Revised:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s12034-014-0716-8

Keywords

Navigation