Bulletin of Materials Science

, Volume 33, Issue 3, pp 251–255

Effect of substrate roughness on growth of diamond by hot filament CVD

  • Awadesh K. Mallik
  • S. R. Binu
  • L. N. Satapathy
  • Chandrabhas Narayana
  • Md Motin Seikh
  • S. A. Shivashankar
  • S. K. Biswas
Article

DOI: 10.1007/s12034-010-0039-3

Cite this article as:
Mallik, A.K., Binu, S.R., Satapathy, L.N. et al. Bull Mater Sci (2010) 33: 251. doi:10.1007/s12034-010-0039-3

Abstract

Polycrystalline diamond coatings are grown on Si (100) substrate by hot filament CVD technique. We investigate here the effect of substrate roughening on the substrate temperature and methane concentration required to maintain high quality, high growth rate and faceted morphology of the diamond coatings. It has been shown that as we increase the substrate roughness from 0.05 μm to 0.91 μm (centre line average or CLA) there is enhancement in deposited film quality (Raman peak intensity ratio of sp3 to non-sp3 content increases from 1.65 to 7.13) and the substrate temperature can be brought down to 640°C without any additional substrate heating. The coatings grown at adverse conditions for sp3 deposition has cauliflower morphology with nanocrystalline grains and coatings grown under favourable sp3 condition gives clear faceted grains.

Keywords

Hot filament CVDpolycrystalline diamond coatingroughnessmorphologyquality

Copyright information

© Indian Academy of Sciences 2010

Authors and Affiliations

  • Awadesh K. Mallik
    • 2
    • 1
  • S. R. Binu
    • 3
    • 1
  • L. N. Satapathy
    • 5
    • 1
  • Chandrabhas Narayana
    • 6
    • 1
  • Md Motin Seikh
    • 4
    • 1
  • S. A. Shivashankar
    • 2
    • 1
  • S. K. Biswas
    • 2
    • 3
    • 1
  1. 1.Central Glass and Ceramic Research InstituteKolkataIndia
  2. 2.Materials Research CentreIndian Institute of ScienceBangaloreIndia
  3. 3.Department of Mechanical EngineeringIndian Institute of ScienceBangaloreIndia
  4. 4.Solid State and Structural Chemistry UnitIndian Institute of ScienceBangaloreIndia
  5. 5.Ceramic Technological InstituteBharat Heavy Electricals LimitedBangaloreIndia
  6. 6.Jawaharlal Nehru Centre for Advanced Scientific ResearchBangaloreIndia