, Volume 5, Issue 3, pp 576-580,
Open Access This content is freely available online to anyone, anywhere at any time.
Date: 25 Dec 2009

Optical Properties of GaAs Quantum Dots Fabricated by Filling of Self-Assembled Nanoholes


Experimental results of the local droplet etching technique for the self-assembled formation of nanoholes and quantum rings on semiconductor surfaces are discussed. Dependent on the sample design and the process parameters, filling of nanoholes in AlGaAs generates strain-free GaAs quantum dots with either broadband optical emission or sharp photoluminescence (PL) lines. Broadband emission is found for samples with completely filled flat holes, which have a very broad depth distribution. On the other hand, partly filling of deep holes yield highly uniform quantum dots with very sharp PL lines.