, Volume 5, Issue 2, pp 353-359,
Open Access This content is freely available online to anyone, anywhere at any time.
Date: 18 Nov 2009

Fabrication of a Highly Sensitive Chemical Sensor Based on ZnO Nanorod Arrays

Abstract

We report a novel method for fabricating a highly sensitive chemical sensor based on a ZnO nanorod array that is epitaxially grown on a Pt-coated Si substrate, with a top–top electrode configuration. To practically test the device, its O2 and NO2 sensing properties were investigated. The gas sensing properties of this type of device suggest that the approach is promising for the fabrication of sensitive and reliable nanorod chemical sensors.