Nano Express

Nanoscale Research Letters

, Volume 5, Issue 2, pp 353-359

Open Access This content is freely available online to anyone, anywhere at any time.

Fabrication of a Highly Sensitive Chemical Sensor Based on ZnO Nanorod Arrays

  • Jae Young ParkAffiliated withSchool of Materials Science and Engineering, Inha University
  • , Sun-Woo ChoiAffiliated withSchool of Materials Science and Engineering, Inha University
  • , Sang Sub KimAffiliated withSchool of Materials Science and Engineering, Inha University Email author 

Abstract

We report a novel method for fabricating a highly sensitive chemical sensor based on a ZnO nanorod array that is epitaxially grown on a Pt-coated Si substrate, with a top–top electrode configuration. To practically test the device, its O2 and NO2 sensing properties were investigated. The gas sensing properties of this type of device suggest that the approach is promising for the fabrication of sensitive and reliable nanorod chemical sensors.

Keywords

ZnO nanorod array Chemical sensor MOCVD