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Controlled Growth of Ordered III-Nitride Core–Shell Nanostructure Arrays for Visible Optoelectronic Devices

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Abstract

We demonstrate the growth of ordered arrays of nonpolar \(\{ 10\bar{1}0\} \) core–shell nanowalls and semipolar \( \{ 10\bar{1}1\}\) core–shell pyramidal nanostripes on c-plane (0001) sapphire substrates using selective-area epitaxy and metal organic chemical vapor deposition. The nanostructure arrays are controllably patterned into LED mesa regions, demonstrating a technique to impart secondary lithography features into the arrays. We study the dependence of the nanostructure cores on the epitaxial growth conditions and show that the geometry and morphology are strongly influenced by growth temperature, V/III ratio, and pulse interruption time. We also demonstrate the growth of InGaN quantum well shells on the nanostructures and characterize the structures by using micro-photoluminescence and cross-section scanning tunneling electron microscopy.

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References

  1. S. Nakamura, M. Senoh, N. Iwasa, and S. Nagahama, Jpn. J. Appl. Phys. 34, L797 (1995).

    Article  Google Scholar 

  2. M.R. Krames, O.B. Shchekin, R. Mueller-Mach, G.O. Mueller, L. Zhou, G. Harbers, and M.G. Craford, J. Disp. Technol. 3, 160 (2007).

    Article  Google Scholar 

  3. M.C. Schmidt, K.C. Kim, H. Sato, N. Fellows, H. Masui, S. Nakamura, S.P. DenBaars, and J.S. Speck, Jpn. J. Appl. Phys. 46, L126 (2007).

    Article  Google Scholar 

  4. D.F. Feezell, M.C. Schmidt, S.P. DenBaars, and S. Nakamura, MRS Bull. 34 (2009). doi:10.1557/mrs2009.93.

  5. S. Nakamura, M. Senoh, S. Nagahama, N. Iwasa, T. Yamada, T. Matsushita, H. Kiyoku, Y. Sugimoto, T. Kozaki, H. Umemoto, M. Sano, and K. Chocho, Appl. Phys. Lett. 72, 211 (1998).

    Article  Google Scholar 

  6. T. Miyoshi, S. Masui, T. Okada, T. Yanamoto, T. Kozaki, S. Nagagama, and T. Mukai, Appl. Phys. Express 2, 062201 (2009).

    Article  Google Scholar 

  7. A. Avramescu, T. Lermer, J. Müller, C. Eichler, G. Bruederl, M. Sabathil, S. Lutgen, and U. Strauss, Appl. Phys. Express 3, 061003 (2010).

    Article  Google Scholar 

  8. P. Waltereit, O. Brandt, A. Trampert, H.T. Grahn, J. Menniger, M. Ramsteiner, M. Reiche, and K.H. Ploog, Nature 406 (2000). doi:10.1038/35022529.

  9. S. Chichibu, T. Azuhata, T. Sota, and S. Nakamura, Appl. Phys. Lett. 69, 4188 (1996).

    Article  Google Scholar 

  10. Q. Dai, M.F. Schubert, M.H. Kim, J.K. Kim, E.F. Schubert, D.D. Koleske, M.H. Crawford, S.R. Lee, A.J. Fischer, G. Thaler, and M.A. Banas, Appl. Phys. Lett. 94, 111109 (2009).

    Article  Google Scholar 

  11. J. Piprek, Phys. Status Solidi A 207, 10 (2010).

    Google Scholar 

  12. S. Nakamura, Semicond. Sci. Technol. 14, R27 (1999).

    Article  Google Scholar 

  13. P. Kozodoy, J.P. Ibbetson, H. Marchand, P.T. Fini, S. Keller, J.S. Speck, S.P. Denbaars, and U.K. Mishra, Appl. Phys. Lett. 73, 975 (1998).

    Article  Google Scholar 

  14. T. Mukai, K. Takekawa, and S. Nakamura, Jpn. J. Appl. Phys. 37, L839 (1998).

    Article  Google Scholar 

  15. M. Schmidt, K.C. Kim, R.M. Farrell, D.F. Feezell, D.A. Cohen, M. Saito, K. Fujito, J.S. Speck, S.P. DenBaars, and S. Nakamura, Jpn. J. Appl. Phys. 46, L190 (2007).

    Article  Google Scholar 

  16. K.C. Kim, M.C. Schmidt, H. Sato, F. Wu, N. Fellows, M. Saito, K. Fujito, J.S. Speck, S. Nakamura, and S.P. DenBaars, Phys. Status Solidi (RRL) 3 (2007).

  17. S. Ling, T. Lu, S. Chang, J. Chen, H. Kuo, and S. Wang, Appl. Phys. Lett. 96, 231101 (2010).

    Article  Google Scholar 

  18. D.F. Feezell and S. Nakamura, in Semiconductor Lasers: Fundamentals and Applications, 1st ed., ed. A. Baranov and E. Tournie (Oxford: Woodhead Publishing Limited, 2013), p. 221.

  19. S.D. Hersee, X. Sun, and X. Wang, Nano Lett. 6, 8 (2006).

    Article  Google Scholar 

  20. E. Kioupakis, Q. Yan, and C.G. Van de Walle, Appl. Phys. Lett. 101, 231107 (2012).

    Article  Google Scholar 

  21. S.D. Hersee, A.K. Rishinaramangalam, M.N. Fairchild, L. Zhang, and P. Varangis, J. Mater. Res. 26, 2293 (2011).

    Article  Google Scholar 

  22. C. Li, H. Yang, T. Hsu, Y. Shen, A. Liu, and Y. Wu, J. Appl. Phys. 113, 183104 (2013).

    Article  Google Scholar 

  23. H. Kim, Y. Cho, H. Lee, S. Kim, S. Ryu, D. Kim, T. Kang, and K. Chung, Nano Lett. 4, 1059 (2004).

    Article  Google Scholar 

  24. S.D. Hersee, M. Fairchild, A.K. Rishinaramangalam, M.S. Ferdous, L. Zhang, P.M. Varangis, B.S. Swartzentruber, and A.A. Talin, Electron. Lett. 45, 75 (2009).

    Article  Google Scholar 

  25. H. Sekiguchi, K. Kishino, and A. Kikuchi, Appl. Phys. Lett. 96, 231104 (2010).

    Article  Google Scholar 

  26. S. Gradecak, F. Qian, Y. Li, H.-G. Park, and C.M. Lieber, Appl. Phys. Lett. 87, 173111 (2005).

    Article  Google Scholar 

  27. Y. Huang, X. Duan, Y. Cui, and C.M. Lieber, Nano Lett. 2, 101 (2002).

    Article  Google Scholar 

  28. A.K. Rishinaramangalam, M.N. Fairchild, S.D. Hersee, G. Balakrishnan, and D.F. Feezell, J. Vac. Sci. Technol. B 31, 3 (2013).

    Article  Google Scholar 

  29. T. Yeh, Y. Lin, B. Ahn, L.S. Stewart, P.D. Dapkus, and S.R. Nutt, Appl. Phys. Lett. 100, 033119 (2012).

    Article  Google Scholar 

  30. C. Liao, W. Chang, Y. Yao, H. Chen, C. Su, C. Chen, C. Hsieh, H. Chen, C. Tu, Y. Kiang, C. Yang, and T. Hsu, J.␣Appl. Phys. 113, 054315 (2013).

    Article  Google Scholar 

  31. X. Wang, S. Li, M.S. Mohajerani, J. Ledig, H.H. Wehmann, M. Mandl, M. Strassburg, U. Steegmüller, U. Jahn, J. Lähnemann, H. Riechert, I. Griffiths, D. Cherns, and A. Waag, Cryst. Growth Des. 13, 3475 (2013).

    Article  Google Scholar 

  32. S.R.J. Brueck, Proc. IEEE 93, 10 (2005).

    Article  Google Scholar 

  33. Y.T. Lin, T.W. Yeh, and P.D. Dapkus, Nanotechnology 23, 465601 (2012).

    Article  Google Scholar 

  34. B.O. Jung, S.Y. Bae, Y. Kato, M. Imura, D.S. Lee, Y. Honda, and H. Amano, CrystEngComm 16, (2014). doi:10.1039/C3CE42266F.

  35. T. Wu and F.C. Hong, Thin Solid Films 529, 269 (2013).

    Article  Google Scholar 

  36. Y. Yeh, K. Chen, Y. Wu, Y. Hsu, and W. Lee, J. Cryst. Growth 314, 43 (2011).

    Article  Google Scholar 

  37. Y.T. Lin, T.W. Yeh, Y. Nakajima, and P.D. Dapkus, Adv. Funct. Mater. (2014). doi:10.1002/adfm.20130367.

    Google Scholar 

  38. K. Wu, T. Wei, D. Lan, X. Wei, H. Zheng, Y. Chen, H. Lu, K. Huang, J. Wang, Y. Luo, and J. Li, Appl. Phys. Lett. 103, 241107 (2013).

    Article  Google Scholar 

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Acknowledgements

This work is supported by the NSF under cooperative agreement EEC-0812056. Any opinions, findings, and conclusions or recommendations expressed in this material are those of the author(s) and do not necessarily reflect the views of the National Science Foundation. This work was performed, in part, at the Center for Integrated Nanotechnologies, an Office of Science User Facility operated for the U.S. Department of Energy (DOE) Office of Science. Sandia National Laboratories is a multi-program laboratory managed and operated by Sandia Corporation, a wholly owned subsidiary of Lockheed Martin Corporation, for the U.S. Department of Energy’s National Nuclear Security Administration under contract DE-AC04-94AL85000. The authors would like to acknowledge Jacqueline Shortridge for helping with SEM sample preparation.

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Authors and Affiliations

  1. Department of Electrical and Computer Engineering, Center for High Technology Materials, University of New Mexico, Albuquerque, NM, 87131, USA

    Ashwin K. Rishinaramangalam, Saadat Mishkat Ul Masabih, Michael N. Fairchild, Jeremy B. Wright, Darryl M. Shima, Ganesh Balakrishnan, S.R.J. Brueck & Daniel F. Feezell

  2. Sandia National Laboratories, Albuquerque, NM, 87185, USA

    Jeremy B. Wright & Igal Brener

  3. Center for Integrated Nanotechnology, Sandia National Laboratories, Albuquerque, NM, 87185, USA

    Igal Brener

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  1. Ashwin K. Rishinaramangalam
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  2. Saadat Mishkat Ul Masabih
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  3. Michael N. Fairchild
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  8. S.R.J. Brueck
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  9. Daniel F. Feezell
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Correspondence to Ashwin K. Rishinaramangalam.

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Rishinaramangalam, A.K., Ul Masabih, S.M., Fairchild, M.N. et al. Controlled Growth of Ordered III-Nitride Core–Shell Nanostructure Arrays for Visible Optoelectronic Devices. J. Electron. Mater. 44, 1255–1262 (2015). https://doi.org/10.1007/s11664-014-3456-z

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  • DOI: https://doi.org/10.1007/s11664-014-3456-z

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