Skip to main content
SpringerLink
Log in

Effect of Sprayed Solution Flow Rate on the Physical Properties of Anatase TiO2 Thin Films

  • Published:
Journal of Electronic Materials Aims and scope Submit manuscript

Abstract

Titanium dioxide (TiO2) thin films were synthesized on glass substrates by spray pyrolysis. The effect of solution flow rate on the physical properties of the films was investigated by use of x-ray diffraction (XRD), scanning electron microscopy, atomic force microscopy (AFM), and spectrophotometry techniques. XRD analysis revealed the tetragonal anatase phase of TiO2 with highly preferred (101) orientation. AFM images showed that grain size on top of TiO2 thin films depended on solution flow rate. An indirect band gap energy of 3.46 eV was determined by means of transmission and reflection measurements. The envelope method, based on the optical transmission spectrum, was used to determine film thickness and optical constants, for example real and imaginary parts of the dielectric constant, refractive index, and extinction coefficient. Ultraviolet and visible photoluminescence emission peaks were observed at room temperature. These peaks were attributed to the intrinsic emission and to the surface defect states, respectively.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. Z. Lu, X. Jiang, B. Zhou, X. Wu, and L. Lu, Appl. Surf. Sci. 257, 10715 (2011).

    Article  Google Scholar 

  2. J. Ben Naceur, R. Mechiakh, F. Bousbih, and R. Chtourou, Appl. Surf. Sci. 257, 10699 (2011).

    Article  Google Scholar 

  3. S. Ding, B. Gao, D. Shan, Y. Sun, and S. Cosnier, Biosens. Bioelectron. 39, 342 (2013).

    Article  Google Scholar 

  4. L. Hou, P. Liu, Y. Li, and C. Wu, Thin Solid Films 517, 4926 (2009).

    Article  Google Scholar 

  5. I. Oja Acik, A. Katerski, A. Mere, J. Aarik, A. Aidla, T. Dedova, and M. Krunks, Thin Solid Films 517, 2443 (2009).

    Article  Google Scholar 

  6. Y. Hu, H.L. Tsai, and C.L. Huang, J. Eur. Ceram. Soc. 23, 691 (2003).

    Article  Google Scholar 

  7. E. Haimi, H. Lipsonen, J. Larismaa, M. Kapulainen, J. Krzak-Ros, and S.P. Hannula, Thin Solid Films 519, 5882 (2011).

    Article  Google Scholar 

  8. A. Mayabadi, V. Waman, M. Kamble, S. Ghosh, B. Gabhale, S. Rondiya, A. Rokade, S. Khadtare, V. Sathe, H. Pathan, S. Gosavi, and S. Jadkar, J. Phys. Chem. Solids 75, 182 (2014).

    Article  Google Scholar 

  9. K. Kollbek, M. Sikora, Cz. Kapusta, J. Szlachetko, A. Brudnik, E. Kusior, K. Zakrzewska, and M. Radecka, Radiat. Phys. Chem. 93, 40 (2013).

    Article  Google Scholar 

  10. S. Zhang, Y.F. Zhu, and D.E. Brodie, Thin Solid Films 213, 265 (1992).

    Article  Google Scholar 

  11. A. Mani, C. Huisman, A. Goossens, and J. Schoonman, J. Phys. Chem. B 112, 10086 (2008).

    Article  Google Scholar 

  12. D.Y. Lee, J.T. Kim, J.H. Park, Y.H. Kim, I.K. Lee, M.H. Lee, and B.Y. Kim, Curr. Appl. Phys. 13, 1301 (2013).

    Article  Google Scholar 

  13. E. Wimmer, H. Krakauer, M. Weinert, and A.J. Freeman, Phys. Rev. B 24, 864 (1981).

    Article  Google Scholar 

  14. P. Blaha, K. Schwarz, G.K.H. Madsen, D. Kavanicka, and J. Luitz, WIEN2K, an Augmented Plane Wave Plus Local Orbitals Program for Calculating Crystal Properties (Wien: Karlheinz Schwarz, Techn. Universitat Wien, 2001). ISBN 3-9501031-1-2.

  15. F. Tran and P. Blaha, Phys. Rev. Lett. 102, 226401 (2009).

    Article  Google Scholar 

  16. I. Oja Acik, V. Kiisk, M. Krunks, I. Sildos, A. Junolainen, M. Danilson, A. Mere, and V. Mikli, Appl. Surf. Sci. 261, 735 (2012).

    Article  Google Scholar 

  17. M.J. Buerger, X-ray crystallography (New York: Wiley Inc, 1960), p. 23.

    Google Scholar 

  18. D.P. Padiyan, A. Marikani, and K.R. Murali, Mat. Chem. Phys. 78, 51 (2002).

    Article  Google Scholar 

  19. K. Girija, S. Thirumalairajan, S.M. Mohan, and J. Chandrasekaran, Chalco. Lett. 6, 351 (2009).

    Google Scholar 

  20. A. Akkari, M. Reghima, C. Guasch, and N. Kamoun-Turki, Mater. Sci. 47, 1365 (2012).

    Article  Google Scholar 

  21. G. Sai and L.B. Gui, Chin. Phys. B 21, 057104 (2012).

    Article  Google Scholar 

  22. J.I. Pankove, Optical Processes in Semiconductors (New Jersey: Prentice-Hall Inc, 1971), p. 93.

    Google Scholar 

  23. J. Tauc, Amorphous and Liquid Semiconductors (New York: Plenum Press, 1974), p. 159.

    Book  Google Scholar 

  24. J.C. Manifacier, J. Gassiot, and J.P. Fillard, J. Phys. E 9, 1002 (1976).

    Article  Google Scholar 

  25. S. Belgacemet and R. Bennaceur, Rev. Phys. Appl. 25, 1245 (1990).

    Article  Google Scholar 

  26. A.V. Manole, M. Dobromir, M. Gîrtan, R. Mallet, G. Rusu, and D. Luca, Ceram. Int. 39, 4771 (2013).

    Article  Google Scholar 

  27. B. Houng, C.C. Liu, and M.T. Hung, Ceram. Int. 39, 3669 (2013).

    Article  Google Scholar 

  28. N. Revathi, P. Prathap, and K.T. Ramakrishna, Reddy. Solid State Sci. 11, 1288 (2009).

    Article  Google Scholar 

  29. P.B. Nair, V.B. Justinvictor, G.P. Daniel, K. Joy, V. Ramakrishnan, D.D. Kumar, and P.V. Thomas, Thin Solid Films 550, 121 (2014).

    Article  Google Scholar 

  30. P.B. Nair, V.B. Justinvictor, G.P. Daniel, K. Joy, V. Ramakrishnan, and P.V. Thomas, Appl. Surf. Sci. 257, 10869 (2011).

    Article  Google Scholar 

  31. K. Murali Krishna, M. Mosaddcq-ur-Rahman, T. Miki, T. Soga, K. Igarashi, S. Tanemura, and M. Umeno, Appl. Surf. Sci. 113, 149 (1997).

    Article  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Laboratoire LPMC, Département de Physique, Faculté des Sciences de Tunis, Université Tunis El Manar, Tunis, Tunisia

    Wafa Naffouti, Tarek Ben Nasr & Najoua Kamoun-Turki

  2. Institut Charles Gerhardt - UMR5253, Chimie Moléculaire et Organisation du Solide, Université Montpellier II, Place Eugène Bataillon-Case 1701, 34095, Montpellier Cedex 05, France

    Ahmed Mehdi

Authors
  1. Wafa Naffouti
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Tarek Ben Nasr
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Ahmed Mehdi
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. Najoua Kamoun-Turki
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Wafa Naffouti.

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Naffouti, W., Nasr, T.B., Mehdi, A. et al. Effect of Sprayed Solution Flow Rate on the Physical Properties of Anatase TiO2 Thin Films. J. Electron. Mater. 43, 4033–4040 (2014). https://doi.org/10.1007/s11664-014-3341-9

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s11664-014-3341-9

Keywords

Search

Navigation