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Role of Zinc Source in Chemical Bath Deposition of Zinc Sulfide Thin Films on Si3N4

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Abstract

Zinc sulfide (ZnS) thin films have been grown by chemical bath deposition (CBD) using different zinc sources on a silicon nitride (Si3N4) substrate in an alkaline solution. The zinc precursors used were zinc acetate, zinc nitrate, and zinc sulfate. The structural and optical characteristics of the ZnS thin films obtained were analyzed. The morphology of the surface showed that the films were compact and uniform, with some pinholes in the surface depending on the zinc source. The most homogeneous and compact surfaces were those obtained using zinc nitrate as the zinc source with a root-mean-square (RMS) value of 3 nm. The transmission spectra indicated average transmittance of 80% to 85% in the spectral range from 300 nm to 800 nm, and the optical bandgap calculated for the films was around 3.71 eV to 3.74 eV.

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Acknowledgements

The authors would like to thank A. Salas Villaseñor, V. H. Martinez Landeros, and Juan C. Ramos for their technical assistance. Financial support was received in the form of Grants from PAPIIT-UNAM IN108613, a scholarship from Conacyt, and Fondo Institucional de Fomento Regional para el Desarrollo Científico, Tecnológico y de Innovación FORDECYT-2011-01.

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Authors and Affiliations

  1. Facultad de Ingeniería, Arquitectura y Diseño, UABC, C.P. 22860, Ensenada, B.C., Mexico

    P. A. Luque & Claudia M. Gómez-Gutiérrez

  2. PCeIM, Centro de Nanociencias y Nanotecnología-UNAM, CP. 22860, Ensenada, B.C., Mexico

    G. Lastra

  3. Instituto de Ingeniería y Tecnología, UACJ, C.P. 32310, Cd. Juárez, Chih., Mexico

    A. Carrillo-Castillo

  4. Department of Materials Science and Engineering, University of Texas at Dallas, Richardson, TX, 75080, USA

    M. A. Quevedo-López

  5. Departamento de Polímeros y Materiales, Universidad de Sonora, C.P. 83000, Hermosillo, Sonora, Mexico

    M. A. Quevedo-López

  6. Centro de Nanociencias y Nanotecnología-UNAM, C.P. 22860, Ensenada, B.C., Mexico

    A. Olivas

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  1. P. A. Luque
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  5. M. A. Quevedo-López
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Correspondence to P. A. Luque.

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Luque, P.A., Gómez-Gutiérrez, C.M., Lastra, G. et al. Role of Zinc Source in Chemical Bath Deposition of Zinc Sulfide Thin Films on Si3N4 . J. Electron. Mater. 43, 4317–4321 (2014). https://doi.org/10.1007/s11664-014-3334-8

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  • DOI: https://doi.org/10.1007/s11664-014-3334-8

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