The effects of atomic hydrogen (H) and Br/methanol etching on Hg1−x Cd x Te films were investigated using x-ray photoelectron spectroscopy (XPS) and atomic force microscopy (AFM). Exposure of an as-received Hg1−x Cd x Te sample to H + H2 resulted in H-induced TeO2 reduction. The oxide reduction was first order with respect to H + H2 exposure. Exposure to H + H2 after etching the Hg1−x Cd x Te film in a Br/methanol solution induced Hg and C depletion. Hg and C removal was also observed after completely reducing the TeO2 on the as-received sample. The removal process was hindered by the formation of a Cd-rich overlayer on both etched and unetched surfaces.
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This research was funded by DRS Technologies Inc., which also supplied the Hg1−x Cd x Te samples.
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Wilks, J.A., Tavakoli, C.M. & Kelber, J.A. Effect of Hydrogen Free Radicals on Hg1−x Cd x Te. J. Electron. Mater. 39, 857–862 (2010). https://doi.org/10.1007/s11664-010-1222-4
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DOI: https://doi.org/10.1007/s11664-010-1222-4