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Improved Sensitivity of 2D Photonic Crystal Mach–Zehnder Interferometer-Based Pressure Sensor

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Abstract

In this paper, we design and simulate a two-dimensional photonic crystal MZI for pressure sensing with a high sensitivity. The sensor is formed by silicon rods of a rectangular lattice distributed in air wafer; when the pressure is applied in an area of rods situated between the Y branch waveguides of MZI, the sensitivity achieved a very high value which is 22.3667 nm/GPa compared to that obtained when the pressure was applied over the entire surface of the sensor structure in which the sensitivity reached 6.36 nm/GPa.

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Authors and Affiliations

  1. Laboratory: Croissance et Caractérisation de Nouveaux Semiconducteurs (LCCNS), Département d’Electronique, Faculté de Technologie, Université Ferhat Abbas, Sétif 1, 19000, Sétif, Algeria

    Bendib Sarra & Zegadi Ameur

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  1. Bendib Sarra
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  2. Zegadi Ameur
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Correspondence to Bendib Sarra.

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Sarra, B., Ameur, Z. Improved Sensitivity of 2D Photonic Crystal Mach–Zehnder Interferometer-Based Pressure Sensor. Plasmonics 13, 413–418 (2018). https://doi.org/10.1007/s11468-017-0525-1

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  • DOI: https://doi.org/10.1007/s11468-017-0525-1

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