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A review of the scalable nano-manufacturing technology for flexible devices

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Abstract

Recent advances in electronic and photonic devices, such as artificial skin, wearable systems, organic and inorganic light-emitting diodes, have gained considerable commercial and scientific interest in the academe and in industries. However, low-cost and high-throughput nano-manufacturing is difficult to realize with the use of traditional photolithographic processes. In this review, we summarize the status and the limitations of current nanopatterning techniques for scalable and flexible functional devices in terms of working principle, resolution, and processing speed. Finally, several remaining unsolved problems in nano-manufacturing are discussed, and future research directions are highlighted.

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Acknowledgments

The authors acknowledge financial support given by the National Natural Science Foundation of China (Grant Nos. 91323303, 61401292, 61405133, 61505131, and 61575135), the Jiangsu Science and Technology Department (Grant Nos. BK20140350, BK20140348, and BK20150309), the Specialized Research Fund for the Doctoral Program of Higher Education (Grant No. 20133201120027), the China Postdoctoral Science Foundation (Grant No. 2015M571816), and the project of the Priority Academic Program Development (PAPD) of Jiangsu Higher Education Institutions.

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Authors and Affiliations

  1. College of Physics, Optoelectronics and Energy & Collaborative Innovation Center of Suzhou Nano Science and Technology, Soochow University, Suzhou, 215006, China

    Wenbin Huang, Xingtao Yu, Yanhua Liu, Wen Qiao & Linsen Chen

  2. Key Lab of Advanced Optical Manufacturing Technologies of Jiangsu Province & Key Lab of Modern Optical Technologies of Education Ministry of China, Soochow University, Suzhou, 215006, China

    Wenbin Huang, Yanhua Liu, Wen Qiao & Linsen Chen

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  1. Wenbin Huang
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  2. Xingtao Yu
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  3. Yanhua Liu
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Correspondence to Wen Qiao.

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Huang, W., Yu, X., Liu, Y. et al. A review of the scalable nano-manufacturing technology for flexible devices. Front. Mech. Eng. 12, 99–109 (2017). https://doi.org/10.1007/s11465-017-0416-3

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