Tribology Letters

, 36:233

Characterization of Microscale Wear in a Polysilicon-Based MEMS Device Using AFM and PEEM–NEXAFS Spectromicroscopy


    • Department of Mechanical EngineeringUniversity of Wisconsin-Madison
  • A. R. Konicek
    • Department of Physics and AstronomyUniversity of Pennsylvania
  • G. E. Wabiszewski
    • Department of Mechanical Engineering and Applied MechanicsUniversity of Pennsylvania
  • A. V. Sumant
    • Center for Nanoscale Materials, Argonne National Laboratories
  • M. P. de Boer
    • MEMS Devices and Reliability Physics DepartmentSandia National Laboratories
  • A. D. Corwin
    • MEMS Science and Technology DepartmentSandia National Laboratories
  • R. W. Carpick
    • Department of Mechanical Engineering and Applied MechanicsUniversity of Pennsylvania
Original Paper

DOI: 10.1007/s11249-009-9478-7

Cite this article as:
Grierson, D.S., Konicek, A.R., Wabiszewski, G.E. et al. Tribol Lett (2009) 36: 233. doi:10.1007/s11249-009-9478-7


Mechanisms of microscale wear in silicon-based microelectromechanical systems (MEMS) are elucidated by studying a polysilicon nanotractor, a device specifically designed to conduct friction and wear tests under controlled conditions. Photoelectron emission microscopy (PEEM) was combined with near-edge X-ray absorption fine structure (NEXAFS) spectroscopy and atomic force microscopy (AFM) to quantitatively probe chemical changes and structural modification, respectively, in the wear track of the nanotractor. The ability of PEEM–NEXAFS to spatially map chemical variations in the near-surface region of samples at high lateral spatial resolution is unparalleled and therefore ideally suited for this study. The results show that it is possible to detect microscopic chemical changes using PEEM–NEXAFS, specifically, oxidation at the sliding interface of a MEMS device. We observe that wear induces oxidation of the polysilicon at the immediate contact interface, and the spectra are consistent with those from amorphous SiO2. The oxidation is correlated with gouging and debris build-up in the wear track, as measured by AFM and scanning electron microscopy (SEM).


Microscale wear Microelectromechanical systems (MEMS) Nanotractor Photoelectron emission microscopy (PEEM) Atomic force microscopy (AFM)

Copyright information

© Springer Science+Business Media, LLC 2009