Measurement Techniques

, Volume 55, Issue 8, pp 908–913

Selection of optimal parameters of the electronic probe of a scanning electron microscope in measurement of the geometric parameters of objects by means of a defocusing probe

  • V. V. Alzoba
  • A. Yu. Kuzin
  • Yu. V. Larionov
  • A. V. Rakov
  • P. A. Todua
  • M. N. Filippov
Article

DOI: 10.1007/s11018-012-0059-z

Cite this article as:
Alzoba, V.V., Kuzin, A.Y., Larionov, Y.V. et al. Meas Tech (2012) 55: 908. doi:10.1007/s11018-012-0059-z
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Estimation of the procedural error of measurements of the geometric parameters of objects by a method involving defocusing of the electron probe of a scanning electron microscope is carried out. The procedural error is caused by the dependence of the results of measurements on the parameters of the probe. It is shown that this error may be reduced by selecting optimal parameters of the probe at which the actual measurement conditions correspond in the best way possible to the requirements of the computational model.

Keywords

scanning electron microscopedefocusing method

Copyright information

© Springer Science+Business Media New York 2012

Authors and Affiliations

  • V. V. Alzoba
    • 1
  • A. Yu. Kuzin
    • 1
  • Yu. V. Larionov
    • 2
  • A. V. Rakov
    • 1
  • P. A. Todua
    • 1
  • M. N. Filippov
    • 3
  1. 1.Research Center for the Study of the Properties of Surfaces and Vacuum (NITsPV)MoscowRussia
  2. 2.Prokhorov General Physics Institute, Russian Academy of Sciences (IOF RAN)MoscowRussia
  3. 3.Kurnakov Institute of General and Inorganic Chemistry, Russian Academy of Sciences (IONKh RAN)MoscowRussia