Article

Measurement Techniques

, Volume 55, Issue 8, pp 908-913

Selection of optimal parameters of the electronic probe of a scanning electron microscope in measurement of the geometric parameters of objects by means of a defocusing probe

  • V. V. AlzobaAffiliated withResearch Center for the Study of the Properties of Surfaces and Vacuum (NITsPV) Email author 
  • , A. Yu. KuzinAffiliated withResearch Center for the Study of the Properties of Surfaces and Vacuum (NITsPV)
  • , Yu. V. LarionovAffiliated withProkhorov General Physics Institute, Russian Academy of Sciences (IOF RAN)
  • , A. V. RakovAffiliated withResearch Center for the Study of the Properties of Surfaces and Vacuum (NITsPV)
  • , P. A. ToduaAffiliated withResearch Center for the Study of the Properties of Surfaces and Vacuum (NITsPV)
  • , M. N. FilippovAffiliated withKurnakov Institute of General and Inorganic Chemistry, Russian Academy of Sciences (IONKh RAN)

Rent the article at a discount

Rent now

* Final gross prices may vary according to local VAT.

Get Access

Estimation of the procedural error of measurements of the geometric parameters of objects by a method involving defocusing of the electron probe of a scanning electron microscope is carried out. The procedural error is caused by the dependence of the results of measurements on the parameters of the probe. It is shown that this error may be reduced by selecting optimal parameters of the probe at which the actual measurement conditions correspond in the best way possible to the requirements of the computational model.

Keywords

scanning electron microscope defocusing method