Measurement Techniques

, Volume 55, Issue 8, pp 867–875

Size measurements in microelectronic technology

Nanometrology

DOI: 10.1007/s11018-012-0052-6

Cite this article as:
Nikitin, A.V. Meas Tech (2012) 55: 867. doi:10.1007/s11018-012-0052-6
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The status of and problems with size measurements in the technologies for fabrication of microelectronic devices with dimensions of hundreds or tens of nanometers are examined under industrial production conditions. It is argued that relative measurements are inadequate and it is necessary to proceed to measurements on an absolute size scale that will ensure absolute accuracy of the results, as well as their reproducibility, which are especially important for the development of nanometer-sized devices.

Keywords

algorithms nonlinearity calibration of magnification reproducibility and accuracy of results 

Copyright information

© Springer Science+Business Media New York 2012

Authors and Affiliations

  1. 1.Institute of Arts and Information Technologies, BranchSt. PetersburgRussia

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