Measurement Techniques

, Volume 55, Issue 8, pp 867-875

First online:

Size measurements in microelectronic technology

  • A. V. NikitinAffiliated withInstitute of Arts and Information Technologies, Branch Email author 

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The status of and problems with size measurements in the technologies for fabrication of microelectronic devices with dimensions of hundreds or tens of nanometers are examined under industrial production conditions. It is argued that relative measurements are inadequate and it is necessary to proceed to measurements on an absolute size scale that will ensure absolute accuracy of the results, as well as their reproducibility, which are especially important for the development of nanometer-sized devices.


algorithms nonlinearity calibration of magnification reproducibility and accuracy of results