Size measurements in microelectronic technology
- A. V. Nikitin
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The status of and problems with size measurements in the technologies for fabrication of microelectronic devices with dimensions of hundreds or tens of nanometers are examined under industrial production conditions. It is argued that relative measurements are inadequate and it is necessary to proceed to measurements on an absolute size scale that will ensure absolute accuracy of the results, as well as their reproducibility, which are especially important for the development of nanometer-sized devices.
- M. Makushin, “The world market for microelectronics after the crisis: New realities and old problems,” Elektronika NTB (2010), Iss. 2.
- International Technology Roadmap for Semiconductors (ITRS), SIA.
- A. V. Nikitin, D. Y. Yeremin, and M. Sandy, “The importance of accuracy in SEM metrology,” Proc. SPIE, 6922, No. 154 (2008).
- U.S. Patent 6.978.215, Dec. 20, 2005.
- U.S. Patent 6.969.852, Nov. 29, 2005.
- U.S. Patent 6.807.314, Oct. 19, 2004.
- U.S. Patent 6.664.532, Dec. 16, 2003.
- U.S. Patent 6.573.500, June 3, 2003.
- U.S. Patent 6.878.935, Apr. 12, 2005.
- U.S. Patent 6.563.116, May 13, 2003.
- A. V. Nikitin, “Use of mathematical modeling for measurements of nanodimensions in microelectronics,” Izmer. Tekhn., No. 12, 25–29 (2011); Measur. Techn., 54, No. 12, 1346–1352 (2011). CrossRef
- Size measurements in microelectronic technology
Volume 55, Issue 8 , pp 867-875
- Cover Date
- Print ISSN
- Online ISSN
- Springer US
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- calibration of magnification
- reproducibility and accuracy of results
- Industry Sectors
- A. V. Nikitin (1)
- Author Affiliations
- 1. Institute of Arts and Information Technologies, Branch, St. Petersburg, Russia