Abstract
By fabrication of several bolometric detectors on the YBCO film made of Metal-Organic Deposition (MOD) and the effect of pattering and film parameters on the optical responsivity of transition edge sensors is investigated. The low cost nonfluorine (MOD) method has been applied to fabricate YBCO thin films with different patterning parameters. The measurement results of the optical responsivity versus modulation frequency up to 100 KHz for these devices are reported.
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Khrebtov, I.A., Tkachenko, A.D.: High-temperature superconductor bolometers for the IR region. Opt. Zh. 66, 79–86 (1999)
Hosseini, M., Kokabi, A., Moftakharzadeh, A., Vesaghi, M.A., Fardmanesh, M.: Effect of substrate thickness on responsivity of free-membrane bolometric detectors. IEEE Sens. J. 11(12), 3283–3287 (2011)
Fardmanesh, M., Scoles, K., Rothwarf, A.: DC characteristics of patterned YBa2Cu3O7−x superconducting thin-film bolometers: artifacts related to Joule heating, ambient pressure,and microstructure. IEEE Trans. Appl. Supercond. 8, 69 (1998)
Moftakharzadeh, A., Kokabi, A., Bozbey, A., Ghods-Elahi, T., Vesaghi, M.A., Banzet, M., Schubert, J., Fardmanesh, M.: Investigation of bias current and modulation frequency dependences of detectivity of YBCO TES and the effects of coating of Cu–C composite absorber layer. IEEE Trans. Appl. Supercond. 19(4), 3688–3693 (2009)
Méchin, L., Villégier, J.C., Bloyet, D.: Suspended epitaxial YBaCuO microbolometers fabricated by silicon micromachining: modeling and measurements. J. Appl. Phys. 81(10), 7039 (1997)
Araki, T., Yamagiwa, K., Suzuki, K., Hirabayashi, I., Tanaka, S.: Supercond. Sci. Technol. 14, L21 (2001)
McIntyre, P.C., Cima, M.J., Ng, M.F.: J. Appl. Phys. 68, 4183 (1990)
Kumagai, T., Manabe, T., Yamaguchi, I., Kondo, W., Imai, F., Murayama, K., Mizuta, S.: Preparation of 2-inch-diameter double-sided YBa2Cu3O7 films by coating–pyrolysis process. Phys. C 357–360, 1346–1349 (2001)
Manabe, T., Sohma, M., Yamaguchi, I., Kondo, W., Tsukada, K., Mizuta, S., Kumagai, T.: Preparation of high- Jc large-size YBCO films (30×10 cm2) by coating–pyrolysis process on CeO2-buffered sapphire. Phys. C 412–414, 896–899 (2004)
Tsukada, K., Yamaguchi, I., Sohma, M., Kondo, W., Kamiya, K., Kumagai, T., Manabe, T.: Preparation of epitaxial YBa2Cu3O7−y films on CeO2-buffered yttria-stabilized zirconia substrates by fluorine-free metalorganic deposition. Phys. C 458(1/2), 29–33 (2007)
Manabe, T., Yamaguchi, I., Tsukada, K., Sohma, M., Kondo, W., Kamiya, K., Kumagai, T.: Distribution of Jc in rectangular-shaped YBCO films prepared by MOD using various coating methods. IEEE Trans. Appl. Supercond. 17(2), 3491–3494 (2007)
Hosseini, M., Moftakharzadeh, A., Kokabi, A., Vesaghi, M.A., Kinder, H., Fardmanesh, M.: Characterization of a transition-edge bolometer made of YBCO thin films prepared by nonfluorine metal–organic deposition. IEEE Trans. Appl. Supercond. 21(6), 3585–3591 (2011)
Khrebtov, I.A.: Noise of High Temperature Superconducting Bolometers, vol. 151, pp. 97–107. Springer, Berlin (2005)
Nahum, M., Verghese, S., Richards, P.L., Char, K.: Thermal boundary resistance for YBa2Cu3O7−δ films. Appl. Phys. Lett. 59(16), 2034–2036 (1991)
Bozbey, A., Fardmanesh, M., Askerzade, I.N., Banzet, M., Schubert, J.: Effects of the superconductivity transition on the response of YBCO edge transition bolometers. Supercond. Sci. Technol. 16(12), 1554–1558 (2003)
Repsas, K., Laurinavicius, A., Vaskevicius, A.R., Anisimovas, F.: Response of superconducting Y–Ba–Cu–O films to millimeter wave radiation. Appl. Phys. Lett. 79(27), 4544–4546 (2001)
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Hosseini, M., Moftakharzadeh, A., Kokabi, A. et al. Effect of Geometry, Joule Heating, and Critical Current on the Responsivity of MOD Superconducting Transition Edge Sensors. J Supercond Nov Magn 26, 831–834 (2013). https://doi.org/10.1007/s10948-012-1845-1
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DOI: https://doi.org/10.1007/s10948-012-1845-1