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Development of Sub-micron Broadband Lens-Coupled LEKIDs for Sub-mm Astronomy

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Abstract

We present a fabrication method for sub-micron lens-coupled lumped element kinetic inductance detectors (LEKIDs) for broadband sub-millimeter (sub-mm) and THz radiation detection. The LEKIDs are fabricated from very thin (12 nm) and narrow (200 nm) aluminum lines to match the impedance of the LEKID to the substrate impedance. The fabrication process is based on a combination of maskless laserwriter lithography and electron beam lithography, providing low (few microns) and high resolution (down to 200 nm) over large areas in a single process. Preliminary optical characterization shows that the fabricated LEKIDs are sensitive to 1.5 THz radiation.

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Acknowledgments

This work was supported as part of a collaborative project, SPACEKIDS, funded via Grant No. 313320 provided by the European Commission under Theme SPA.2012.2.2-01 of Framework Programme 7. D. G. acknowledges RYC-2012-09864 and MAD2D-CM Program (S2013/MIT-3007) for the financial support. A. G., P. P, and J.M-P acknowledge the support from projects AYA2010-21697-C05-01, FIS2012-39262-C06-01, and ESP2013-47809-C3-1-R.

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Authors and Affiliations

  1. Centro de Astrobiología (INTA-CSIC), Ctra. Torrejon-Ajalvir km.4, 28850, Torrejon de Ardoz, Spain

    A. Gomez, P. Prieto & J. Martin-Pintado

  2. SRON, Netherlands Institute for Space Research, Sorbonnelaan 2, 3584CA, Utrecht, The Netherlands

    J. Bueno & J. J. A. Baselmans

  3. Department of Physics and Astronomy, Cardiff University, Cardiff, CF24 3 AA, UK

    S. Doyle, P. Barry & A. Bideaud

  4. Terahertz Sensing Group, Faculty of Electrical Engineering, Delft University of Technology, Mekelweg 4, 2628 CD, Delft, The Netherlands

    N. Llombart

  5. IMDEA-Nanociencia, Faraday 9, 28049, Madrid, Spain

    D. Granados

  6. Instituto de Microelectronica de Madrid (CSIC), Isaac Newton 8, 28760, Tres Cantos, Spain

    J. L. Costa-Kramer

Authors
  1. A. Gomez
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  2. P. Prieto
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  3. J. Bueno
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  4. S. Doyle
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  5. P. Barry
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  6. A. Bideaud
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  7. N. Llombart
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  8. D. Granados
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  9. J. L. Costa-Kramer
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  10. J. Martin-Pintado
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  11. J. J. A. Baselmans
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Corresponding author

Correspondence to A. Gomez.

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Gomez, A., Prieto, P., Bueno, J. et al. Development of Sub-micron Broadband Lens-Coupled LEKIDs for Sub-mm Astronomy. J Low Temp Phys 184, 148–153 (2016). https://doi.org/10.1007/s10909-016-1517-9

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  • DOI: https://doi.org/10.1007/s10909-016-1517-9

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