, Volume 151, Issue 1-2, pp 245-248

Design and Fabrication of Absorber Coupled TES Microbolometers on Continuous Silicon-Nitride Windows

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Abstract

The implementation of TES based microbolometer arrays will achieve unprecedented sensitivities for mm and sub-mm astronomy through fabrication of large format arrays and improved linearity and stability arising from strong electro-thermal feedback. We report on progress in developing TES microbolometers using Mo/Au thin films and Au absorbing structures. We present measurements of suppressing the thermal conductance through the etching of features on a continuous Silicon-Nitride window.