Article

Journal of Low Temperature Physics

, Volume 151, Issue 1, pp 245-248

Design and Fabrication of Absorber Coupled TES Microbolometers on Continuous Silicon-Nitride Windows

  • Clarence L. ChangAffiliated withKavli Institute for Cosmological Physics, University of Chicago Email author 
  • , John E. CarlstromAffiliated withKavli Institute for Cosmological Physics, University of Chicago
  • , Aaron DatesmanAffiliated withMaterial Sciences Division, Argonne National Laboratory
  • , Stephan S. MeyerAffiliated withKavli Institute for Cosmological Physics, University of Chicago
  • , Valentyn NovosadAffiliated withMaterial Sciences Division, Argonne National Laboratory
  • , Volodymyr G. YefremenkoAffiliated withMaterial Sciences Division, Argonne National Laboratory
  • , Tom CrawfordAffiliated withKavli Institute for Cosmological Physics, University of Chicago
  • , Tom DownesAffiliated withKavli Institute for Cosmological Physics, University of Chicago
  • , Jeff McMahonAffiliated withKavli Institute for Cosmological Physics, University of Chicago
    • , Kathryn MiknaitisAffiliated withKavli Institute for Cosmological Physics, University of Chicago
    • , Joaquin D. VieiraAffiliated withKavli Institute for Cosmological Physics, University of Chicago

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Abstract

The implementation of TES based microbolometer arrays will achieve unprecedented sensitivities for mm and sub-mm astronomy through fabrication of large format arrays and improved linearity and stability arising from strong electro-thermal feedback. We report on progress in developing TES microbolometers using Mo/Au thin films and Au absorbing structures. We present measurements of suppressing the thermal conductance through the etching of features on a continuous Silicon-Nitride window.

Keywords

Bolometers TES Polarization

PACS

07.57.Kp 95.55.Rg 95.75.Hi