Journal of Low Temperature Physics

, Volume 151, Issue 1, pp 245–248

Design and Fabrication of Absorber Coupled TES Microbolometers on Continuous Silicon-Nitride Windows

Authors

    • Kavli Institute for Cosmological PhysicsUniversity of Chicago
  • John E. Carlstrom
    • Kavli Institute for Cosmological PhysicsUniversity of Chicago
  • Aaron Datesman
    • Material Sciences DivisionArgonne National Laboratory
  • Stephan S. Meyer
    • Kavli Institute for Cosmological PhysicsUniversity of Chicago
  • Valentyn Novosad
    • Material Sciences DivisionArgonne National Laboratory
  • Volodymyr G. Yefremenko
    • Material Sciences DivisionArgonne National Laboratory
  • Tom Crawford
    • Kavli Institute for Cosmological PhysicsUniversity of Chicago
  • Tom Downes
    • Kavli Institute for Cosmological PhysicsUniversity of Chicago
  • Jeff McMahon
    • Kavli Institute for Cosmological PhysicsUniversity of Chicago
  • Kathryn Miknaitis
    • Kavli Institute for Cosmological PhysicsUniversity of Chicago
  • Joaquin D. Vieira
    • Kavli Institute for Cosmological PhysicsUniversity of Chicago
Article

DOI: 10.1007/s10909-007-9639-8

Cite this article as:
Chang, C.L., Carlstrom, J.E., Datesman, A. et al. J Low Temp Phys (2008) 151: 245. doi:10.1007/s10909-007-9639-8

Abstract

The implementation of TES based microbolometer arrays will achieve unprecedented sensitivities for mm and sub-mm astronomy through fabrication of large format arrays and improved linearity and stability arising from strong electro-thermal feedback. We report on progress in developing TES microbolometers using Mo/Au thin films and Au absorbing structures. We present measurements of suppressing the thermal conductance through the etching of features on a continuous Silicon-Nitride window.

Keywords

BolometersTESPolarization

PACS

07.57.Kp95.55.Rg95.75.Hi

Copyright information

© Springer Science+Business Media, LLC 2008