Design and Fabrication of Absorber Coupled TES Microbolometers on Continuous Silicon-Nitride Windows
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- Chang, C.L., Carlstrom, J.E., Datesman, A. et al. J Low Temp Phys (2008) 151: 245. doi:10.1007/s10909-007-9639-8
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The implementation of TES based microbolometer arrays will achieve unprecedented sensitivities for mm and sub-mm astronomy through fabrication of large format arrays and improved linearity and stability arising from strong electro-thermal feedback. We report on progress in developing TES microbolometers using Mo/Au thin films and Au absorbing structures. We present measurements of suppressing the thermal conductance through the etching of features on a continuous Silicon-Nitride window.