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Surface topography and hydrogen sensor response of APCVD grown multilayer graphene thin films

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Abstract

Atmospheric pressure chemical vapour deposition was employed to deposit graphene thin films on thermally oxidized p-silicon substrates. Raman spectroscopy and energy dispersive spectroscopy revealed the multilayer nature and the composition of the grown graphene films respectively. The defective nature and the defect density of the graphene films were determined from the Raman experiments. Field effect scanning electron microscopy, transmission electron microscopy and atomic force microscopy were used to study the surface morphology of the multilayer graphene films. The film topography was sensitive to temperature and time of growth. A suitable growth mechanism has been proposed to explain the topographical observations. The large surface area of the multilayer films was found to be suitable for hydrogen sensor applications and the sensing results were correlated with the morphology of the grown films.

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Acknowledgments

D. Dutta thankfully acknowledges CSIR, Government of India for providing the junior research fellowship to carry out the work. S.K. Hazra is thankful to IC Design and Fabrication Centre, Department of ETCE, Jadavpur University, India for providing the collaborative research opportunity. The authors gratefully acknowledge the help of Prof. S. Basumajumdar, Materials Science Centre, IIT Kharagpur, India for TEM images.

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Authors and Affiliations

  1. Department of ETCE, IC Design and Fabrication Centre, Jadavpur University, Kolkata, India

    D. Dutta, C. K. Sarkar & S. Basu

  2. Dipartimento di Ingegneria Meccanica e Industriale, Brescia University, Brescia, Italy

    E. Bontempi

  3. Department of Physics, University of New Haven, West Haven, CT, USA

    Y. You & S. Sinha

  4. Department of Electrical and Computer Engineering, University of New Haven, West Haven, CT, USA

    Y. You & S. Sinha

  5. Department of Physics, Jadavpur University, Kolkata, India

    D. Dutta & J. Das

  6. Department of Physics and Materials Science, Jaypee University of Information Technology (JUIT), Waknaghat, Himachal Pradesh, India

    S. K. Hazra

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  1. D. Dutta
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Correspondence to S. Basu.

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Dutta, D., Bontempi, E., You, Y. et al. Surface topography and hydrogen sensor response of APCVD grown multilayer graphene thin films. J Mater Sci: Mater Electron 28, 157–166 (2017). https://doi.org/10.1007/s10854-016-5506-1

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  • DOI: https://doi.org/10.1007/s10854-016-5506-1

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