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Dependence of structural, optical and electrical properties on substrate temperature for hexagonal MgxZn1−xO films

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Abstract

Single hexagonal-phase MgxZn1−xO films were deposited on glass substrates by pulsed laser deposition from a ZnO target mixed with MgO. The effect of substrate temperature on the structural, electrical and optical properties was investigated by X-ray diffraction and the transmittance measurements. It was observed that Mg incorporation lead to a clear shift of the (002) peak position to lower angle with reference to pure ZnO films due to the residual stress change with deposition temperature. It was also found that Mg doping increased the resistivity by 2 orders of magnitude and the maximum resistivity was 0.072 Ω·cm at 550 °C with the carrier concentration of 1.1 × 1019 cm−3. The visible transmittance of above 80 % was obtain in the alloy films, which optical band gap was observed to increase with the substrate temperature, attaining 3.85 eV at 600 °C. The possible mechanism was discussed.

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Acknowledgments

This work was supported by Youth Foundation of China University of Mining and Technology No. 2009A055, as well as the Priority Academic Program Development of Jiangsu Higher Education Institutions.

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Authors and Affiliations

  1. School of Materials Science and Engineering, China University of Mining and Technology, Xuzhou, 221116, People’s Republic of China

    Xiuquan Gu, Bo Wang, Yulong Zhao & Yinghuai Qiang

  2. State Key Laboratory of Silicon Materials, Department of Materials Science and Engineering, Zhejiang University, Hangzhou, 310027, People’s Republic of China

    Xiuquan Gu

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  1. Xiuquan Gu
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  2. Bo Wang
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  4. Yinghuai Qiang
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Correspondence to Xiuquan Gu.

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Gu, X., Wang, B., Zhao, Y. et al. Dependence of structural, optical and electrical properties on substrate temperature for hexagonal MgxZn1−xO films. J Mater Sci: Mater Electron 24, 884–888 (2013). https://doi.org/10.1007/s10854-012-0843-1

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  • DOI: https://doi.org/10.1007/s10854-012-0843-1

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