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Design and analysis of non-uniform shaped RF MEMS switch

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Abstract

In this paper, we present a novel non-uniform shaped cantilever based DC contact radio frequency microelectromechanical systems (RF MEMS) switch. This switch can be employed for various wireless mobile applications in frequency range of DC-10 GHz as it shows excellent RF characteristics with low actuation voltage. The design is optimized in the terms of electrostatic actuation mechanism, which included switch beam thickness, beam gap, spring shape and materials. Also, it’s optimized shape and size of contact geometry and material ensures the high reliability, high isolation and very low insertion loss. The main features of this switch are simplicity of structure, reliability of contact, excellent RF characteristics, low actuation voltage and excellent figure of merit. We investigate the proposed design with Coventorware software for electromechanical and electromagnetic analysis and, get very promising results. The paper briefly outlines the design of RF MEMS switch and also focuses on the analysis of various switching parameters.

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Correspondence to Vaibhav Kolte.

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Kolte, V., Mahajan, P.M. Design and analysis of non-uniform shaped RF MEMS switch. J Comput Electron 13, 547–554 (2014). https://doi.org/10.1007/s10825-014-0566-z

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  • DOI: https://doi.org/10.1007/s10825-014-0566-z

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