Abstract
The exceptional chemical, mechanical and thermal properties of diamond make this material the ideal choice for resonant MEMS. Micro-cantilevers designed for biochemical applications have been fabricated using CVD diamond. In this work, the mechanical properties of these cantilevers were investigated by two different techniques: bending test using a Contact Surface Profilometer and resonant test, using a Laser Doppler Vibrometer. The Young’s Modulus of diamond thin film was estimated by these two tests. For the resonance test, the estimated values are comprised between 930 and 1300 GPa while bending test gives values between 950 and 1030 GPa. The load–displacement characteristics and the fracture point (or ultimate stress) have also been investigated.
Similar content being viewed by others
References
Adiga VP, Sumant AV, Suresh S, Gudeman C, Carlisle JA, Auciello O, Carpick RW (2009) Mechanical stiffness and dissipation in ultrananocrystalline diamond resonators. Phys Rev B 79:245403
Bongrain A (2011) Nouvelles technologies de capteurs MEMS en diamant pour applications de transduction. Marne la Valée
Claude AK, Cardinale GF (1992) Young’s modulus and Poisson’s ratio of CVD diamond. In: Proc. SPIE 1759, Diamond Optics V, 178 (November 20, 1992). doi:10.1117/12.130771
Djemia P, Dugautier C, Chauveau T, Dogheche E, De Barros MI, Vandenbulcke L (2001) J Appl Phys 90: 3771
Gad-el-Hak M (ed) (2001) The MEMS handbook. CRC press, Boca Raton
Garcia A, Flaño N, Viviente JL, Onate JI, Gomez-Aleixandre C, Sanchez-Garrido O (1993) Micromechanical properties of diamond films deposited by microwave-plasma-enhanced chemical vapour deposition. Diam Relat Mater 2(5–7):933–938 (ISSN 0925-9635)
Gupta RK, Osterberg PM, Senturia SD (1996) Material property measurements of micromechanical polysilicon beams. Micromachining and microfabrication’96. International society for optics and photonics
Gupta RK, Osterberg PM, Senturia SD (1996) Material property measurements of micromechanical polysilicon beams. In: Proc. SPIE 2880, microlithography and metrology in micromachining II, 39 (September 13, 1996)
Hopcroft M, Kramer T, Kim G, Takashima K, Higo Y, Moore D, Brugger J (2005) Micromechanical testing of SU-8 cantilevers. Fatigue Fract Eng Mater Struct 28:735–742
Nebel CE et al (2007) Diamond for bio-sensor applications. J Phys D Appl Phys 40(20):6443–6466
Osterberg PM, Senturia SD (1997) M-TEST: a test chip for MEMS material property measurement using electrostatically actuated test structures. Microelectromech Sys J 6(2):107–118
Petersen KE (1978) Dynamic micromechanics on silicon: techniques and devices. Electron Devices IEEE Trans 25(10):1241–1250
Scorsone E, Saada S, Arnault JC, Bergonzo P (2009) Enhanced control of diamond nanoparticle seeding using a polymer matrix. J Appl Phys 106:014908
Sillero E, Williams OA, Lebedev V, Cimalla V, Röhlig C-C, Nebel CE, Calle F (2009) Static and dynamic determination of the mechanical properties of nanocrystalline diamond micromachined structures. J Micromech Microeng 19:1–6
Veeco D (2002) 3ST surface profilometer. Available at http://www.veeco.com
Vinci RP, Bravman JC (1991) Mechanical testing of thin films. In: Dig Tech Papers Transducers’91, Int. conf. solid state sensors and actuators, pp 943–948
Williams OA (2011) Diam Relat Mater 20:621–640
Acknowledgments
The authors would like to thank the European Community’s Seventh Framework Programme (FP7) under grant agreement no. 285203 (SNIFFER PROJECT) for their financial support.
Author information
Authors and Affiliations
Corresponding author
Rights and permissions
About this article
Cite this article
Possas, M., Rousseau, L., Ghassemi, F. et al. Fabrication and micromechanical characterization of polycrystalline diamond microcantilevers. Microsyst Technol 22, 609–615 (2016). https://doi.org/10.1007/s00542-015-2625-1
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s00542-015-2625-1