Abstract
Radial-contour-mode micromechanical disk resonator with high frequency and high quality factor (Q) is attractive for wireless communication application. The nonlinear behaviors are usually not expected for disk resonator with high stiffness. However, when disk resonator is actuated by large bias voltage or works in vacuum, spring softening effect was observed. And spring hardening effect occurs when the resonator works in low temperature (below 110 K). In this work, the nonlinear behaviors of disk resonator are investigated. For disk resonator with high Q, the driving force should be reduced to ensure a linear operation when it works at low temperature or in vacuum.
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Luo, W., Zhao, J., Yuan, Q. et al. Nonlinear effect of disk resonator. Microsyst Technol 22, 2971–2976 (2016). https://doi.org/10.1007/s00542-015-2622-4
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DOI: https://doi.org/10.1007/s00542-015-2622-4