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MEMS-based monolithic three-axis fiber-optic acceleration sensor

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Abstract

In this paper, a MEMS-based monolithic three-axis fiber-optic acceleration sensor is proposed, consisting of three optical fiber collimators and a three-axis acceleration sensing chip. The novel acceleration sensor includes two horizontal sensing units and one vertical sensing unit integrated on a single silicon substrate. Three optical fiber collimators are on the same side of the three-axis sensing chip, thus reducing the package size and cost. In each sensing unit, the micromirror, suspended on a pair of torsion beams, has a torsional angle in response to acceleration in sensing direction. The torsion angle is monitored using fiber-optic detection technique. The sensing system operation principle has been analyzed theoretically, its mechanical performances were simulated using the FEM simulation, and its fabricated process flow was proposed. Using bulk micromachining technologies, the horizontal and the vertical sensing units were successfully fabricated. Finally the individual fabricated sensing units were packaged and tested.

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Authors and Affiliations

  1. State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, China

    Xiaowei Wang, Shaolong Zhong, Jing Xu & Yaming Wu

  2. Graduate University of Chinese Academy of Sciences, Beijing, China

    Xiaowei Wang

Authors
  1. Xiaowei Wang
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  2. Shaolong Zhong
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  3. Jing Xu
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  4. Yaming Wu
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Correspondence to Xiaowei Wang.

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Wang, X., Zhong, S., Xu, J. et al. MEMS-based monolithic three-axis fiber-optic acceleration sensor. Microsyst Technol 22, 699–708 (2016). https://doi.org/10.1007/s00542-015-2417-7

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  • DOI: https://doi.org/10.1007/s00542-015-2417-7

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