Skip to main content
SpringerLink
Log in

Laser welding of sapphire wafers using a thin-film fresnoite glass solder

  • Technical Paper
  • Published:
Microsystem Technologies Aims and scope Submit manuscript

Abstract

Two sapphire substrates are tightly bonded through a fresnoite-glass thin film, by irradiation with a 1,064 nm nanosecond laser. The composition of the glass solder at the bond interface changes, due to incorporation of Al from the upper substrate. The oxidic solder remains amorphous after laser irradiation, but after annealing (850 °C for 1 h) crystalline structures are observed in different morphologies, which are attributed not only to fresnoite, but also to Ba–Ti–Al–O phases, which lead to a strong luminescence of the laser irradiated region under UV excitation.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Fig. 1
Fig. 2
Fig. 3
Fig. 4
Fig. 5
Fig. 6
Fig. 7
Fig. 8
Fig. 9
Fig. 10

Similar content being viewed by others

References

  • Abali S (2011) Effect of TiO2 doping on microstructural properties of Al2O3-based single crystal ceramics. J Ceram Process Res 12(1):21–25

    MathSciNet  Google Scholar 

  • Abe Y, Watanabe T, Tanabe H, Kagiya K (2007) Dissimilar metal joining of magnesium alloy to steel by FSW. Adv Mater Res-Switz 15–17:393–397

    Article  Google Scholar 

  • Ávila-Robinson A, Miyazaki K (2013) Dynamics of scientific knowledge bases as proxies for discerning technological emergence—the case of MEMS/NEMS technologies. Technol Forecast Soc 80(6):1071–1084

    Article  Google Scholar 

  • Baek SW, Jeong J, Kim JH, Lee C, Bae J (2010) Interconnect-integrated solid oxide fuel cell with high temperature sinter-joining process. Int J Hydrogen Energ 35(21):11878–11889

    Article  Google Scholar 

  • Batfalsky P, Haanappel VAC, Malzbender J, Menzler NH, Shemet V, Vinke IC, Steinbrech RW (2006) Chemical interaction between glass–ceramic sealants and interconnect steels in SOFC stacks. J Power Sources 155(2):128–137

    Article  Google Scholar 

  • Bechthold PS, Haussuhl S, Michael E, Eckstein J, Recker K, Wallrafen F (1978) Second harmonic-generation in fresnoite, Ba2TiSi2O8. Phys Lett A 65(5–6):453–454

    Article  Google Scholar 

  • Berman D, Krim J (2013) Surface science, MEMS and NEMS: progress and opportunities for surface science research performed on, or by, microdevices. Prog Surf Sci 88(2):171–211

    Article  Google Scholar 

  • Bi ZX, Zhang R, Wang XS, Gu SL, Shen B, Shi Y, Liu ZG, Zheng YD (2003) Synthesis of zinc aluminate spinel film through the solid-phase reaction between zinc oxide film and alpha-alumina substrate. J Am Ceram Soc 86(12):2059–2062

    Article  Google Scholar 

  • Blasse G (1979) Fresnoite (Ba2TiSi2O8)—luminescent compound with a long decay time. J Inorg Nucl Chem 41(5):639–641

    Article  Google Scholar 

  • Cabral AA, Fokin VM, Zanotto ED, Chinaglia CR (2003) Nanocrystallization of fresnoite glass. I. Nucleation and growth kinetics. J Non-Cryst Solids 330(1-3):174–186

    Article  Google Scholar 

  • Cadée MC, Ijdo DJW, Blasse G (1982) Crystal structure and luminescence of compounds A3BC10O20. J Solid State Chem 41(1):39–43

    Article  Google Scholar 

  • Cao J, Song XG, Wu LZ, Qi JL, Feng JC (2012) Characterization of Al/Ni multilayers and their application in diffusion bonding of TiAl to TiC cermet. Thin Solid Films 520(9):3528–3531

    Article  Google Scholar 

  • Dai Y, Ma H, Lu B, Yu B, Zhu B, Qiu J (2008) Femtosecond laser-induced oriented precipitation of Ba2TiGe2O8 crystals in glass. Opt Express 16(6):3912–3917

    Article  Google Scholar 

  • Dobrovinskaya ER, Lytvynov LA, Pishchik V (2009) Sapphire: material, manufacturing, applications. Micro- and opto-electronic materials, structures and systems. Springer Science+Business Media, New York. ISBN: 978-0-387-85694-0

    Google Scholar 

  • Donald IW, Mallinson PM, Metcalfe BL, Gerrard LA, Fernie JA (2011) Recent developments in the preparation, characterization and applications of glass- and glass–ceramic-to-metal seals and coatings. J Mater Sci 46(7):1975–2000

    Article  Google Scholar 

  • Faidel D, Behr W, Gross S, Reisgen U (2010) Development of a laser-based glass sealing joining process for the fuel cell manufacturing. Phys Proc 5:153–162

    Article  Google Scholar 

  • Fallon GD, Gatehouse BM, Wright PJ (1985) Single-crystal structure determinations of BaTiAl6O12 and Ba3TiAl10O20. J Solid State Chem 60(2):203–208

    Article  Google Scholar 

  • Georgiev DG, Sultana T, Mian A, Auner G, Herfurth H, Witte R, Newaz G (2005) Laser fabrication and characterization of sub-millimeter joints between polyimide and Ti-coated borosilicate glass. J Mater Sci 40(21):5641–5647

    Article  Google Scholar 

  • Guha JP, Kolar D, Volavšek B (1976) Preparation and characterization of new ternary compounds in the system BaOTiO2Al2O3. J Solid State Chem 16(1–2):49–54

    Article  Google Scholar 

  • Hamdan Hadi Kusuma ZI (2012) UV-spectroscopy and band structure of Ti: Al2O3. Solid State Sci Technol 20(1–2):41–47

    Google Scholar 

  • Hawke RS, Syassen K, Holzapfel WB (1974) Apparatus for high-pressure Raman-spectroscopy. Rev Sci Instrum 45(12):1598–1601

    Article  Google Scholar 

  • Hoche T, Kleebe HJ, Brydson R (2001) Can fresnoite (Ba2TiSi2O8) incorporate Ti3+ when crystallizing from highly reduced melts? Philos Mag A 81(4):825–839

    Article  Google Scholar 

  • Höche T, Grodzicki M, Heyroth F, van Aken PA (2005) Assessment of transition-metal coordination in glasses by electron energy-loss spectroscopy. Phys Rev B 72(20):205111

    Article  Google Scholar 

  • Höche T, Gerlach JW, Petsch T (2006) Static-charging mitigation and contamination avoidance by selective carbon coating of TEM samples. Ultramicroscopy 106(11–12):981–985

    Article  Google Scholar 

  • Honma T, Ihara R, Benino Y, Sato R, Fujiwara T, Komatsu T (2008) Writing of crystal line patterns in glass by laser irradiation. J Non-Cryst Solids 354(2–9):468–471

    Article  Google Scholar 

  • Katayama S, Kawahito Y (2008) Laser direct joining of metal and plastic. Scripta Mater 59(12):1247–1250

    Article  Google Scholar 

  • Kawahito Y, Niwa Y, Terajima T, Katayama S (2010) Laser direct joining of glassy metal Zr55Al10Ni5Cu30 to engineering plastic polyethylene terephthalate. Mater Trans 51(8):1433–1436

    Article  Google Scholar 

  • Lee H, Lee SM, Ada ET, Kim B, Weiss M, Perry SS, Rabalais JW (1999) Shallow implantation of Ti(+) ions in sapphire [alpha-Al(2)O(3)(0001)]. Nucl Instrum Meth B 157(1–4):226–232

    Article  Google Scholar 

  • Lee PF, Dai JY, Wong KH, Chan HLW, Choy CL (2003) Study of interfacial reaction and its impact on electric properties of Hf–Al–O high-k gate dielectric thin films grown on Si. Appl Phys Lett 82(15):2419–2421

    Article  Google Scholar 

  • Li J, Zhang XM, Liu AQ, Lu C, Hao JZ (2005) A monolithically integrated photonic MEMS subsystem for optical network applications. Opt Commun 249(4–6):579–586

    Article  Google Scholar 

  • Liu HX, Wang K, Zhang C, Li P, Gao YY, Hu Y, Wang X (2012) Influence of film thickness of Ti coating on bonding quality of glass with PET. Surf Eng 28(9):705–709

    Article  MATH  Google Scholar 

  • Lorenz M, de Pablos-Martin A, Patzig C, Stölzel M, Brachwitz K, Hochmuth H, Grundmann M, Höche T (2013) Highly textured fresnoite thin films synthesized by pulsed laser deposition with CO2 laser direct heating up to 1250 °C. Appl Phys, J Phys D

    Google Scholar 

  • Luo C, Lin LW (2002) The application of nanosecond-pulsed laser welding technology in MEMS packaging with a shadow mask. Sensor Actuat A-Phys 97–98:398–404

    Article  Google Scholar 

  • Martin LL, Haro-Gonzalez P, Martin IR, Puerto D, Solis J, Caceres JM, Capuj NE (2010) Local devitrification of Dy3+ doped Ba2TiSi2O8 glass by laser irradiation. Optic Mater 33(2):186–190

    Article  Google Scholar 

  • Meng E, Hoang T (2012) MEMS-enabled implantable drug infusion pumps for laboratory animal research, preclinical, and clinical applications. Adv Drug Deliver Rev 64(14):1628–1638

    Article  Google Scholar 

  • Müller A, Lorenz M, Brachwitz K, Lenzner J, Mittwoch K, Skorupa W, Grundmann M, Höche T (2011) Fresnoite thin films grown by pulsed laser deposition: photoluminescence and laser crystallization. CrystEngComm 13(21):6377–6385

    Article  Google Scholar 

  • Ning H, Geng Z, Ma J, Huang F, Qian Z, Han Z (2003a) Joining of sapphire and hot pressed Al2O3 using Ag70.5Cu27.5Ti2 brazing filler metal. Ceram Int 29(6):689–694

    Article  Google Scholar 

  • Ning H, Huang F, Ma J, Geng Z, Han Z (2003b) Sapphire joining using Ag70.5Cu27.5Ti2 brazing filler metal. Rare Metal Mat Eng 32(3):236–239

    Google Scholar 

  • Ogawa R, Masai H, Takahashi Y, Mori H, Fujiwara T, Komatsu T (2009) Crystallization behavior of BaO-TiO(2)-GeO(2) glass thin film. Key Eng Mat 388:149–152

    Article  Google Scholar 

  • Page PS, Dhabekar BS, Bhatt BC, Dhoble AR, Godbole SV (2010) Role of Ti4+ in the luminescence process of Al2O3:Si, Ti. J Lumin 130(5):882–887

    Article  Google Scholar 

  • Pollnau M (2008) Sapphire and other dielectric waveguide devices. Paper presented at the IEEE LEOS annual meeting, Newport Beach, California, USA

  • Pruessner MW, King TT, Kelly DP, Grover R, Calhoun LC, Ghodssi R (2003) Mechanical property measurement of InP-based MEMS for optical communications. Sensor Actuat A-Phys 105(2):190–200

    Article  Google Scholar 

  • Qi L, Nishii K, Yasui M, Aoki H, Namba Y (2010) Femtosecond laser ablation of sapphire on different crystallographic facet planes by single and multiple laser pulses irradiation. Opt Laser Eng 48(10):1000–1007

    Article  Google Scholar 

  • Qiu XT, Zhu J, Oiler J, Yu HY (2009) Reactive multilayer foils for MEMS wafer level packaging. In: 2009 IEEE 59th electronic components and technology conference, vol 1–4:1311–1316

  • Rupesh Kumar A, Rao TGVM, Veeraiah N, Rami Reddy M (2013) Fluorescence spectroscopic studies of Mn2+ ions in SrO–Al2O3–B2O3–SiO2 glass system. Opt Mater 35(3):402–406

    Article  Google Scholar 

  • Schneider M, Richter W, Keding R, Russel C (1998) XPS investigations on coordination and valency of Ti in fresnoite glasses and glass ceramics. J Non-Cryst Solids 226(3):273–280

    Article  Google Scholar 

  • Strecker A, Salzberger U, Mayer J (1993) Specimen preparation for transmission electron microscopy: reliable method for cross-sections and brittle materials. Prakt Metallogr-Pr M 30(10):482–495

    Google Scholar 

  • Tae Ho Kim YSK, Jeong Young Joon, Na Young Hoon, Lim Hwan Hong, Cha Myoung Sick, Ryu Bong Ki (2008) Optical properties and structure of BaO-TiO2-SiO2 glass ceramics. J Korean Ceram Soc 45(12):821–826

    Article  Google Scholar 

  • Takahashi Y, Kitamura K, Benino Y, Fujiwara T, Komatsu T (2005) Second-order optical nonlinear and luminescent properties of Ba2TiSi2O8 nanocrystallized glass. Appl Phys Lett 86(9):091110–091113

    Article  Google Scholar 

  • Teslenko VV (1991) Sapphire-to-metal bounding. Elektrotekhnika 7:63–66

    Google Scholar 

  • Theppakuttai S, Shao DB, Chen SC (2003) Experimental investigation and numerical simulation of glass-silicon bonding by localized laser heating. In: ASME international mechanical engineering congress, 2003. p 107–112

  • Tsai NC, Sue CY (2007) Review of MEMS-based drug delivery and dosing systems. Sensor Actuat A-Phys 134(2):555–564

    Article  Google Scholar 

  • Varmazis C, Viswanathan R, Caton R (1978) Technique for bonding gold and silver metals on sapphire. Rev Sci Instrum 49(4):549–550

    Article  Google Scholar 

  • Wang CB, Tu R, Goto T, Shen Q, Zhang LM (2009) Structural and optical properties of BaTi2O5 thin films prepared by pulsed laser deposition at different substrate temperatures. Mater Chem Phys 113(1):130–134

    Article  Google Scholar 

  • Watanabe W, Onda S, Tamaki T, Itoh K, Nishii J (2006) Space-selective laser joining of dissimilar transparent materials using femtosecond laser pulses. Appl Phys Lett 89(2):021106

    Article  Google Scholar 

  • Weber MJ (2003) Handbook of optical materials. Laser and optical science and technology series

  • Wegert TA, Cary, Karen (2004) Products incorporating luminescent sealants. United States Patent

  • Wild MJ, Gillner A, Poprawe R (2001) Locally selective bonding of silicon and glass with laser. Sensor Actuat A-Phys 93(1):63–69

    Article  Google Scholar 

  • Wisniewski W, Patschger M, Russel C (2012) Sr-fresnoite surface crystallisation in a 2SrO∙TiO2∙2.75 SiO2 glass studied by EBSD. CrystEngComm 14(17):5425–5433

    Article  Google Scholar 

  • Xi S, Shi T, Liu D, Xu L, Long H, Lai W, Tang Z (2013) Integration of carbon nanotubes to three-dimensional C-MEMS for glucose sensors. Sensor Actuat A-Phys 198:15–20

    Article  Google Scholar 

  • Yu DQ (2012) Development of reliable low temperature wafer level hermetic bonding using composite seal joint. Microelectron Reliab 52(3):589–594

    Article  Google Scholar 

  • Zhang JP, Lee BI, Schwartz RW, Ding ZY (1999) Grain oriented crystallization, piezoelectric, and pyroelectric properties of (BaxSr2-x)TiSi2O8 glass ceramics. J Appl Phys 85(12):8343–8348

    Article  Google Scholar 

  • Zheng Q, Smedskjaer MM, Youngman RE, Potuzak M, Mauro JC, Yue Y (2012) Influence of aluminum speciation on the stability of aluminosilicate glasses against crystallization. Appl Phys Lett 101(4):041906

    Article  Google Scholar 

  • Zhu B, Dai Y, Ma H, Zhang S, Qiu J (2008) Direct writing Eu3+-doped Ba2TiSi2O8 crystalline pattern by femtosecond laser irradiation. J Alloy Compd 460(1–2):590–593

    Article  Google Scholar 

Download references

Acknowledgments

The authors acknowledge financial support of FhG Internal Programs under Grant No. Attract 692 280. We are thank to Prof. C. Rüssel of Friedrich Schiller University Jena, Otto Schott Institute, Jena, (Germany) for providing fresnoite bulk glass for the PLD target, and to Holger Hochmuth for preparation of the fresnoite thin films by PLD. The Leipzig authors kindly acknowledge support of their work by Deutsche Forschungs—gemeinschaft (DFG) within Sonderforschungsbereich 762 “Functionality of oxide interfaces”.

Author information

Authors and Affiliations

  1. Fraunhofer Institute for Mechanics of Materials IWM, Walter-Hülse-Str. 1, Halle, 06120, Germany

    Araceli de Pablos-Martín, M. Ebert, C. Patzig, M. Krause & Th. Höche

  2. Fraunhofer Center for Silicon Photovoltaics CSP, Otto-Eißfeldt-Str. 12, Halle, 06120, Germany

    M. Dyrba & P. Miclea

  3. Institut für Experimentelle Physik II, Universität Leipzig, Linnéstr. 5, Leipzig, 04103, Germany

    M. Lorenz & M. Grundmann

Authors
  1. Araceli de Pablos-Martín
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. M. Ebert
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. C. Patzig
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. M. Krause
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. M. Dyrba
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. P. Miclea
    View author publications

    You can also search for this author in PubMed Google Scholar

  7. M. Lorenz
    View author publications

    You can also search for this author in PubMed Google Scholar

  8. M. Grundmann
    View author publications

    You can also search for this author in PubMed Google Scholar

  9. Th. Höche
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Araceli de Pablos-Martín.

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

de Pablos-Martín, A., Ebert, M., Patzig, C. et al. Laser welding of sapphire wafers using a thin-film fresnoite glass solder. Microsyst Technol 21, 1035–1045 (2015). https://doi.org/10.1007/s00542-014-2398-y

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s00542-014-2398-y

Keywords

Search

Navigation