Microsystem Technologies

, Volume 20, Issue 10, pp 2071–2077

Fabrication and characterization of polymer microprisms

  • William Brian Derek Forfang
  • Timothy Glenn Conner
  • Byoung Hee You
  • Taehyun Park
  • In-Hyouk Song
Technical Paper

DOI: 10.1007/s00542-014-2067-1

Cite this article as:
Forfang, W.B.D., Conner, T.G., You, B.H. et al. Microsyst Technol (2014) 20: 2071. doi:10.1007/s00542-014-2067-1

Abstract

An increasing interest in low-cost polymer micro-fabrication techniques demands an increasing necessity for characterizing such techniques. In this research, polymethylmethacrylate (PMMA) and polydimethylsiloxane (PDMS) microprisms were realized by hot embossing and replica molding processes, respectively. In both replication methods, the polymer microprisms were patterned with the same brass master mold. This mold was fabricated via high precision micro-milling, which accommodates a wide range of achievable sidewall angles and a large workable surface area relative to lithographic fabrication technologies. The pattern designed for replication contained a microprism array of 20 parallel, equal length prisms, grouped into four sets of distinct prism geometries. The four geometries include three triangular microprisms with varying interior angles and one semicircular microprism with a radius of 500 μm. The polymer microprisms replicated by PMMA hot embossing and PDMS replica molding were found to exhibit interior angle reductions relative to the brass master mold dimensions. This paper includes a description and analysis of a surface treatment process by which the RMS surface roughness of the mentioned PMMA microprisms was shown to reduce by 28 % after controlled thermal exposures just above their glass transition temperature.

Copyright information

© Springer-Verlag Berlin Heidelberg 2014

Authors and Affiliations

  • William Brian Derek Forfang
    • 1
  • Timothy Glenn Conner
    • 2
  • Byoung Hee You
    • 2
  • Taehyun Park
    • 3
  • In-Hyouk Song
    • 2
  1. 1.Ingram School of EngineeringTexas State UniversitySan MarcosUSA
  2. 2.Department of Engineering TechnologyTexas State UniversitySan MarcosUSA
  3. 3.Division of Mechanical Engineering and AutomationKyungnam UniversityChangwonKorea