Abstract
Cantilevered beams with piezoelectric layers have been used as a MEMS piezoelectric energy harvester for the one decade. The literature includes several structures such as rectangular triangular and trapezoidal geometry. In several literatures the length of cantilever is optimized to enhance the performance. This paper presents enhancing the performance of energy harvester by optimizing the PZT length through simulation using moving mesh analysis in COMSOL Multiphysics. The results show that the MEMS piezoelectric energy harvester with optimized PZT length produces more voltage. Simulation results are compared with other structures having traditional and non-traditional cross section.
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Sunithamani, S., Lakshmi, P. & Eba Flora, E. PZT length optimization of MEMS piezoelectric energy harvester with a non-traditional cross section: simulation study. Microsyst Technol 20, 2165–2171 (2014). https://doi.org/10.1007/s00542-013-1920-y
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DOI: https://doi.org/10.1007/s00542-013-1920-y