Abstract
The Twyman-Green (TG) interferometer is widely used to evaluate optical imaging systems. It consists of an object wave and a reference wave for creating an interferogram. In this paper, we propose a simple interferometer that eliminates the actual reference wave. Instead of the piezoelectric trasnducer mirror used in the reference wave, a virtual optics was used via a numerical simulation of plane-wave illumination. A solid immersion lens of NA = 1.84 is described and fabricated for evaluating an interferogram. To verify the proposed method, the resulting interferogram with the aberration analysis was compared with those obtained using a conventional TG interferometer. The total wavefront aberration value was measured about 21 mλRMS and the difference between the conventional and proposed methods was approximately 3 %. Phase-shifting interferometry without mechanical and optical disturbances was demonstrated.
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This research was supported by Basic Science Research Program through the National Research Foundation of Korea (NRF) funded by the Ministry of Education, Science and Technology (2013-027254).
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Min, CK., Jeon, S., Moon, H. et al. Twyman-Green interferometer using virtual optics for eliminating reference wave. Microsyst Technol 19, 1505–1511 (2013). https://doi.org/10.1007/s00542-013-1845-5
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DOI: https://doi.org/10.1007/s00542-013-1845-5