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Patterning of carbon nanotube films on PDMS using SU-8 microstructures

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Abstract

In this paper, we propose a simple and low-cost fabrication technique for patterning carbon nanotube (CNT) films on polydimethylsiloxane (PDMS), which can be used in flexible sensors and electronics. We demonstrate CNT patterning on both recessed and flat PDMS surfaces using a standard photolithography method. By this proposed technique, we were able to fabricate a CNT film, having a high flexibility and good conductivity, on a PDMS surface. A CNT pattern with a minimum feature resolution of 150 μm was obtained using the proposed fabrication technique. The sheet resistance of the CNT film on the PDMS surface was determined to be in the 100–280 Ω/sq range. The thickness and resultant resistivity of the CNT film can be easily controlled by controlling just the spray duration. Furthermore, the gauge factor of the proposed device is higher than that of metal and it increases as the thickness of the CNT film increases.

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Acknowledgments

This work was partially supported by the Pioneer Research Center Program through the National Research Foundation of Korea funded by the Ministry of Education, Science and Technology (2010-0019453) and the National Research Foundation of Korea (NRF) grant funded by the Korea government (MEST) [2009-0076641].

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Authors and Affiliations

  1. Department of Electronic Engineering, Sogang University, 1 Sinsu-dong, Mapo-gu, Seoul, 121-742, Korea

    Dongil Kim & Kwang-Seok Yun

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  1. Dongil Kim
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  2. Kwang-Seok Yun
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Correspondence to Kwang-Seok Yun.

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Kim, D., Yun, KS. Patterning of carbon nanotube films on PDMS using SU-8 microstructures. Microsyst Technol 19, 743–748 (2013). https://doi.org/10.1007/s00542-012-1677-8

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  • DOI: https://doi.org/10.1007/s00542-012-1677-8

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