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Frequency response of in-plane coupled resonators for investigating the acceleration sensitivity of MEMS tuning fork gyroscopes

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Abstract

The frequency response of in-plane coupled resonators is used for investigating the acceleration sensitivity of a MEMS tuning fork gyroscope (TFG) and a new method of suppressing the acceleration output is presented. The unbalancing of two sense resonators in the TFG caused by fabrication errors converted an external vibration into anti-phase mode excitation. To reduce the acceleration output, decoupling between in- and anti-phase modal frequencies [decoupling ratio (DR)] is crucial, since coupled resonators may cause large anti-phase vibrations from the acceleration. The acceleration output model was verified using two coupled resonators with 1 and 5 % stiffness unbalance. FEM simulation results showed a 25 % reduction in the anti-phase vibration by increasing the decoupling ratio from 0.09 to 0.29, irrespective of the coupled resonators designs. Quantitative analysis of a TFG based on coupled resonators with 1 % stiffness unbalance showed the acceleration output decreased from 5.65 to 1.43 deg/s/g.

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Authors and Affiliations

  1. Department of Micro Engineering, Graduate School of Engineering, Kyoto University, Yoshida-Honmachi, Sakyo-ku, Kyoto, 606-8501, Japan

    Thakur Praveen Singh, Koji Sugano, Toshiyuki Tsuchiya & Osamu Tabata

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  1. Thakur Praveen Singh
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  2. Koji Sugano
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  3. Toshiyuki Tsuchiya
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  4. Osamu Tabata
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Correspondence to Thakur Praveen Singh.

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Praveen Singh, T., Sugano, K., Tsuchiya, T. et al. Frequency response of in-plane coupled resonators for investigating the acceleration sensitivity of MEMS tuning fork gyroscopes. Microsyst Technol 18, 797–803 (2012). https://doi.org/10.1007/s00542-012-1510-4

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  • DOI: https://doi.org/10.1007/s00542-012-1510-4

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