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FEM-basierte Analyse eines neuen thermischen Strömungssensors mit drei unterschiedlichen Betriebsmoden

FEM-based analysis of a novel thermal flow sensor featuring three different operating modes

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Summary

A novel design of a miniaturised calorimetric flow sensor is presented. The common sensor layout was modified by adding further membrane thermistors. The new configuration features three different operating modes. Their stationary and dynamic properties were analysed and compared to each other by means of FEM-based simulations.

Zusammenfassung

Ein neuer Entwurf eines miniaturisierten kalorimetrischen Strömungssensors wird vorgestellt. Ausgehend von der Standardkonfiguration wurde durch Hinzufügen weiterer Membran-Thermistoren ein neues Sensorlayout entwickelt, das drei unterschiedliche Betriebsmoden erlaubt. Die stationären und dynamischen Eigenschaften dieser Betriebsmoden wurden mittels FEM(Finite-Elemente-Methode)-Simulationen analysiert und miteinander verglichen.

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Authors and Affiliations

  1. Österreichische Akademie der Wissenschaften, Forschungsstelle für Integrierte Sensorsysteme, Wiener Neustadt, Austria

    S Ćerimović, A Talić & F Kohl

  2. Institut für Sensor- und Aktuatorsysteme, Technische Universität Wien, Wien, Austria

    F Keplinger, J Schalko & A Jachimowicz

Authors
  1. S Ćerimović
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  2. A Talić
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  3. F Kohl
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  4. F Keplinger
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  5. J Schalko
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  6. A Jachimowicz
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Ćerimović, S., Talić, A., Kohl, F. et al. FEM-basierte Analyse eines neuen thermischen Strömungssensors mit drei unterschiedlichen Betriebsmoden. Elektrotech. Inftech. 126, 13–18 (2009). https://doi.org/10.1007/s00502-009-0614-8

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  • DOI: https://doi.org/10.1007/s00502-009-0614-8

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