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Sensing of gaseous HF at low part-per-trillion levels using a tunable 2.5-µm diode laser spectrometer operating at ambient pressure

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Abstract

We demonstrate a sensor based on tunable diode laser absorption spectroscopy for the detection of hydrogen fluoride (HF) gas at ambient pressure. Absorption from the HF R(1) ro-vibrational peak at ν̃ = 4038.962 cm−1 (2.476 µm) in the fundamental (Δν = 1) band is measured. A quantitative spectral fit based on HITRAN data is used to account for overlapping spectral peaks of HF and water vapor, with an rms residual noise of 5 × 10−4 absorbance units. The sensor is optimized for the detection of transient variations in HF concentration. We measure noise-equivalent concentrations for HF of 38 parts-per-trillion by volume (ppt) for 1-s integration times and 2.3 ppt for 10-min integration times.

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Acknowledgments

The authors would like to thank Charles Brown and the PNNL Health Monitoring & Radio Frequency Sensors group for the use of their environmental chamber. The Pacific Northwest National Laboratory is operated for the US Department of Energy (DOE) by the Battelle Memorial Institute under Contract No. DE-AC05-76RL01830.

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  1. Pacific Northwest National Laboratory, PO Box 999, Richland, WA, 99352, USA

    Ian M. Craig, Bret D. Cannon, Matthew S. Taubman, Bruce E. Bernacki, Robert D. Stahl, John T. Schiffern, Tanya L. Myers & Mark C. Phillips

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  1. Ian M. Craig
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Craig, I.M., Cannon, B.D., Taubman, M.S. et al. Sensing of gaseous HF at low part-per-trillion levels using a tunable 2.5-µm diode laser spectrometer operating at ambient pressure. Appl. Phys. B 120, 505–515 (2015). https://doi.org/10.1007/s00340-015-6159-0

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