Skip to main content
Log in

Passivation of InAs/GaSb type II superlattice photodiodes

  • Published:
Applied Physics A Aims and scope Submit manuscript

Abstract

One of the major challenges faced by antimonide-based devices is a result of the large number of surface states that are generated. Surface passivation and subsequent capping of the surfaces are essential for any practical applicability of this material system, as evidenced by the comparison of unpassivated and passivated InAs/GaSb superlattice mid-infrared photodiodes herein. The surface passivation methods include silicon dioxide (SiO2) coating after anodic sulfide, SiO2 coating after anodic oxide, SiO2 coating only, zinc sulfide (ZnS) coating after anodic sulfide, and ZnS coating after ammonium sulfide [(NH4)2S] chemical passivation. The leakage current as a function of bias voltage (IV) for superlattice diodes obtained using different passivation methods has been examined at 77 K. The best performance was demonstrated by the SiO2 after anodic sulfide passivation. The leakage current of the passivated diode is four orders of magnitudes less than that of the unpassivated diode.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Fig. 1
Fig. 2
Fig. 3
Fig. 4

Similar content being viewed by others

References

  1. G.A. Sai Halasz, R. Tsu, L. Esaki, Appl. Phys. Lett. 30, 651 (1977)

    Article  ADS  Google Scholar 

  2. A. Gin, Y. Wei, A. Hood, A. Bajowala, V. Yazdanpanah, M. Razeghi, M. Tidrow, Appl. Phys. Lett. 84, 2037 (2004)

    Article  ADS  Google Scholar 

  3. Koushik Banerjee, Siddhartha Ghosh, Shubhrangshu Mallick, Elena Plis, Sanjay Krishna, J. Electron. Mater. 38, 9 (2009)

    Article  Google Scholar 

  4. S. Simanowski, M. Walther, J. Schmitz, R. Kiefer, N. Herres, F. Fuchs, M. Maier, C. Mermelstein, J. Wagner, G. Weimann, J. Cryst. Growth 201–202 (1999)

  5. H.J. Haugan, F. Szmulowicz, G.J. Brown, K. Mahalingam, Appl. Phys. Lett. 84, 26 (2004)

    Article  Google Scholar 

  6. X.B. Zhang, J.H. Ryou, R.D. Dupuis, S. Mou, S.L. Chuang, C. Xu, K.C. Hsieh, J. Cryst. Growth 287, 2 (2006)

    Article  Google Scholar 

  7. B. Satpati, J. B. Rodriguez, A. Trampert, E. Tournié, A. Joullié, P. Christol, J. Cryst. Growth 301–302 (2007)

  8. H.J. Haugan, S. Elhamri, B. Ullrich, F. Szmulowicz, G.J. Brown, W.C. Mitchel, J. Cryst. Growth 311, 7 (2009)

    Article  Google Scholar 

  9. Y. Huang, J.H. Ryou, R.D. Dupuis, V.R. D’Costa, E.H. Steenbergen, J. Fan, Y.H. Zhang, A. Petschke, M. Mandl, S.L. Chuang, J. Cryst. Growth 314, 1 (2011)

    Article  Google Scholar 

  10. E. Plis, A. Khoshakhlagh, S. Myers, H.S. Kim, N. Gautam, Y.D. Sharma, S. Krishna, S.J. Lee, S.K. Noh, J. Vac. Sci. Technol. B 28, C3–G13 (2010)

    Article  Google Scholar 

  11. H.J. Haugan, G.J. Brown, S.D. Pacley, L. Grazulis, S.T. Fenstermaker, Proc. SPIE 7808, 780806 (2010)

    Article  Google Scholar 

  12. Xiaolu Guo, Wenquan Ma, Jianliang Huang, Yanhua Zhang, Yang Wei, Kai Cui, Yulian Cao, Qiong Li, Semicond. Sci. Technol. 28, 4 (2013)

    Google Scholar 

  13. M. Razeghi, Y. Wei, A. Gin, A. Hood, V. Yazdanpanah, M.Z. Tidrow, V. Nathan, Proc. SPIE 5783, 86 (2005)

    Article  ADS  Google Scholar 

  14. J. Hoffmann, T. Lehnert, D. Hoffmann, H. Fouckhardt, Semicond. Sci. Technol. 24, 6 (2009)

    Google Scholar 

  15. E. Plis, J.B. Rodriguez, G. Balakrishnan, Y.D. Sharma, H.S. Kim, T. Rotter, S. Krishna, Semicond. Sci. Technol. 25, 8 (2010)

    Google Scholar 

  16. A. Hood, A.J. Evans, A. Ikhlassi, G. Sullivan, E. Piquette, D.L. Lee, W.E. Tennant, I. Vurgaftman, C.L. Canedy, E.M. Jackson, J.A. Nolde, C. Yi, E.H. Aifer, Proc. SPIE 7660, 76601M (2010)

    Article  ADS  Google Scholar 

  17. N. Escude (NNIN REU Research Accomplishments, New York) p 32

  18. Andrew Hood, Manijeh Razeghi, Edward H. Aifer, Gail J. Brown, Appl. Phys. Lett. 87, 151113 (2005)

    Article  ADS  Google Scholar 

  19. Aaron Gin, Yajun Wei, Junjik Bae, Andrew Hood, Jongbum Nah, Manijeh Razeghi, Thin Solid Films 447–448 (2004)

  20. E. Plis, M.N. Kutty, S. Myers, H.S. Kim, N. Gautam, L.R. Dawson, S. Krishna, Infrared Phys. Technol. 54, 3 (2011)

    Article  Google Scholar 

  21. Ashonita Chavan, Abhinav Chandola, Sujatha Sridaran, Partha Dutta, J. Appl. Phys. 100, 064512 (2006)

    Article  ADS  Google Scholar 

  22. R. Rehm, M. Walther, Frank Fuchs, J. Schmitz, J. Fleissner, Appl. Phys. Lett. 86, 17 (2005)

    Article  Google Scholar 

  23. V.V. Ekilik, K.S. Tikhomirova, A.G. Berezhnaya, Prot. Met.Phys. Chem. Surf. 47, 3 (2011)

    Google Scholar 

  24. X. Zhang, A.Z. Li, C. Lin, Y.L. Zheng, G.Y. Xu, M. Qi, Y.G. Zhang, J. Cryst. Growth 251, 1–4 (2003)

    Article  ADS  Google Scholar 

  25. J.V. Li, S.L. Chuang, O.V. Sulima, J.A. Cox, J. Appl. Phys. 97, 104506 (2005)

    Article  ADS  Google Scholar 

  26. H.S. Kim, E. Plis, N. Gautam, A. Khoshakhlagh, S. Myers, M.N. Kutty, Y. Sharma, L.R. Dawson, S. Krishna, Proc. SPIE 7660, 76601U (2010)

    Article  ADS  Google Scholar 

  27. I. Sankowska, A. Jasik, J. Kubacka-Traczyk, J.Z. Domagala, K. Regiński, Appl. Phys. A 108, 2 (2012)

    Article  Google Scholar 

  28. B. Klein, J. Montoya, N. Gautam, S. Krishna, Appl. Phys. A 111, 2 (2013)

    Article  Google Scholar 

  29. T.F. Refaat, M.N. Abedin, O.V. Sulima, S. Ismail, U.N. Singh, Proc. SPIE 6295, 629503 (2006)

    Article  Google Scholar 

Download references

Acknowledgments

This work was supported by the National Natural Science of China 61205056.

Author information

Authors and Affiliations

Authors

Corresponding author

Correspondence to Wei Guo Sun.

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Zhang, L.X., Sun, W.G., Zhang, X.F. et al. Passivation of InAs/GaSb type II superlattice photodiodes. Appl. Phys. A 117, 853–856 (2014). https://doi.org/10.1007/s00339-014-8442-z

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s00339-014-8442-z

Keywords

Navigation