Skip to main content
SpringerLink
Log in

Femtosecond laser pulse irradiation effects on thin hydrogenated amorphous carbon layers

  • Published:
Applied Physics A Aims and scope Submit manuscript

Abstract

The irradiation of ∼0.9-μm-thick hydrogenated amorphous carbon (a-C:H) layers deposited on silicon substrates with single femtosecond (fs) laser pulses (35 fs pulse duration, 790 nm centre wavelength) in air is studied experimentally. Irradiation spots have been generated with different peak fluences and subsequently investigated by optical topometry, micro Raman spectroscopy and microscale mechanical indentation in order to evaluate their microscopic, topographical, structural and mechanical properties (e.g. elastic modulus). By this multi-method approach, a clear separation of different effects (delamination and graphitisation) becomes possible. The joint application of mechanical and spectroscopic techniques provides unique insights into the effects of the fs-laser radiation on the carbon layer.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1
Fig. 2
Fig. 3
Fig. 4
Fig. 5
Fig. 6

Similar content being viewed by others

References

  1. D. Bäuerle, Laser Processing and Chemistry, 4th edn. (Springer, Berlin, 2011)

    Book  Google Scholar 

  2. J. Bonse, J. Krüger, J. Appl. Phys. 107, 054902 (2010)

    Article  ADS  Google Scholar 

  3. G. Dumitru, V. Romano, H.P. Weber, S. Pimenov, T. Kononenko, M. Sentis, J. Hermann, S. Bruneau, Appl. Surf. Sci. 222, 226 (2004)

    Article  ADS  Google Scholar 

  4. T.V. Kononenko, V.V. Kononenko, S.M. Pimenov, E.V. Zavedeev, V.I. Konov, V. Romano, G. Dumitru, Diam. Relat. Mater. 14, 1368 (2005)

    Article  ADS  Google Scholar 

  5. R. Koter, M. Weise, A. Hertwig, U. Beck, J. Krüger, J. Optoelectron. Adv. Mater. 12, 663 (2010)

    Google Scholar 

  6. Q. Wu, L. Yu, Y. Ma, Y. Liao, R. Fang, L. Zhang, X. Cheng, K. Wang, J. Appl. Phys. 93, 94 (2003)

    Article  ADS  Google Scholar 

  7. T.V. Kononenko, S.M. Pimenov, V.V. Kononenko, E.V. Zavedeev, V.I. Konov, G. Dumitru, V. Romano, Appl. Phys. A 79, 543 (2004)

    Article  ADS  Google Scholar 

  8. K. Sokolowski-Tinten, W. Ziegler, D. von der Linde, M.P. Siegal, D.L. Overmyer, Appl. Phys. Lett. 86, 121911 (2005)

    Article  ADS  Google Scholar 

  9. N. Yasumaru, K. Miyazaki, J. Kiuchi, Appl. Phys. A 79, 425 (2004)

    Article  ADS  Google Scholar 

  10. J.M. Liu, Opt. Lett. 7, 196 (1982)

    Article  ADS  Google Scholar 

  11. A.C. Ferrrari, J. Robertson, Phys. Rev. B 61, 14095 (2000)

    Article  ADS  Google Scholar 

  12. J. Robertson, Mater. Sci. Eng., R Rep. 47, 129 (2002)

    Article  Google Scholar 

  13. Q. Ding, L. Wang, L. Hu, T. Hu, Y. Wang, Y. Zhang, J. Appl. Phys. 109, 013501 (2011)

    Article  ADS  Google Scholar 

Download references

Acknowledgements

The authors would like to thank B. Strauß (BAM 6.8) for the SEM characterisations. This work was supported by the German Science Foundation (DFG) under grant no. KR 3638/1-1.

Author information

Authors and Affiliations

  1. BAM (Bundesanstalt für Materialforschung und -prüfung), Unter den Eichen 87, 12205, Berlin, Germany

    J. Bonse, A. Hertwig, R. Koter, M. Weise, U. Beck, P. Reinstädt, M. Griepentrog & J. Krüger

  2. Departamento de Física, Universidad Autónoma Metropolitana Iztapalapa, Michoacán y Purísima S/N, México, 09340, DF, Mexico

    M. Picquart & E. Haro-Poniatowski

Authors
  1. J. Bonse
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. A. Hertwig
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. R. Koter
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. M. Weise
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. U. Beck
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. P. Reinstädt
    View author publications

    You can also search for this author in PubMed Google Scholar

  7. M. Griepentrog
    View author publications

    You can also search for this author in PubMed Google Scholar

  8. J. Krüger
    View author publications

    You can also search for this author in PubMed Google Scholar

  9. M. Picquart
    View author publications

    You can also search for this author in PubMed Google Scholar

  10. E. Haro-Poniatowski
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to J. Bonse.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Bonse, J., Hertwig, A., Koter, R. et al. Femtosecond laser pulse irradiation effects on thin hydrogenated amorphous carbon layers. Appl. Phys. A 112, 9–14 (2013). https://doi.org/10.1007/s00339-012-7170-5

Download citation

  • Received:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s00339-012-7170-5

Keywords

Search

Navigation