Abstract
A laser pulse-induced microbump method that aims to measure the mechanical properties of nanofilms is proposed. The sample structure is designed as ‘substrate/AgO x (active layer)/ZnS–SiO2 (nanofilm)’ and the laser pulse is applied to heat the active layer and to create a microbump. The deflections of the microbumps are measured precisely by atomic force microscopy by taking AgO x and ZnS–SiO2 as the active layer and nanofilm, respectively, and by controlling the pulse laser parameters. By transforming the laser power–deflection curve to a pressure–deflection curve, the calculation equations of mechanical properties were strictly derived according to the action principle of a Gaussian intensity profile pulse laser with material and traditional bulge testing equations. The mechanical properties of a ZnS–SiO2 film with only 10-nm thickness were calculated according to the derived equations. The results of the ZnS–SiO2 film are as follows: residual stress is 0.129 MPa, Young’s modulus is 0.441 MPa, and Poisson’s ratio is 0.217.
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Acknowledgements
This work is partially supported by the Natural Science Foundation of China (Grant Nos. 50772120, 60977004, and 11054001), the Shanghai Rising Star Tracking Program (10QH1402700), and the Basic Research Program of China (Grant No. 2007CB935400).
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Dun, A., Wei, J. Mechanical property measurements of nanofilm by microbump method induced by laser pulse. Appl. Phys. A 121, 1425–1432 (2015). https://doi.org/10.1007/s00339-012-7092-2
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DOI: https://doi.org/10.1007/s00339-012-7092-2