Skip to main content
Log in

Fast solvent-driven micropump fabricated by two-photon microfabrication

  • Invited rapid communication
  • Published:
Applied Physics A Aims and scope Submit manuscript

Abstract

A solvent-driven micropump was developed using three-dimensional two-photon microfabrication. The actuation of micropump is utilizing the bending behavior of hydrogel film under asymmetric solvent-stimulus. The micropump could absorb and discharge fluid reversibly by simply alternating solvent composition. Contributing to the thin hydrogel film with the thickness of 2.5 μm, the response time was significantly improved to 0.17 s. The discharge capacity of fluid was estimated to be as low as 9.2×10−2 pL. The pumping of such ultra-low-volume fluid will be useful for further miniaturization of micro-nanofluidic devices.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

References

  1. C.-S. Liao, G.-B. Lee, H.-S. Liu, T.-M. Hsieh, C.-H. Luo, Nucl. Acids Res. 33, e156 (2005)

    Article  Google Scholar 

  2. A.T. Woolley, D. Hadley, P. Landre, A.J. deMello, R.A. Mathies, M.A. Northrup, Anal. Chem. 68, 4081 (1996)

    Article  Google Scholar 

  3. C.-J. Huang, C.-C. Lu, T.-Y. Lin, T.-C. Chou, G.-B. Lee, J. Micromech. Microeng. 17, 835 (2007)

    Article  ADS  Google Scholar 

  4. D.J. Laser, J.G. Santiago, J. Micromech. Microeng. 14, R35 (2004)

    Article  Google Scholar 

  5. B. Fan, G. Song, F. Hussain, Smart Mater. Struct. 14, 400 (2005)

    Article  ADS  Google Scholar 

  6. T. Gerlach, Sens. Actuators A 69, 181 (1998)

    Article  Google Scholar 

  7. H. Andersson, W.V.D. Wijngaart, P. Nilsson, P. Enoksson, G. Stemme, Sens. Actuators B 72, 259 (2001)

    Article  Google Scholar 

  8. O. Français, I. Dufour, Sens. Actuators A 70, 56 (1998)

    Article  Google Scholar 

  9. S. Zeng, C.-H. Chen, J.C. Mikkelsen Jr., G.J. Santiago, Sens. Actuators B 79, 107 (2001)

    Article  Google Scholar 

  10. D.E. Kataoka, S.M. Troian, Nature 402, 794 (1999)

    Article  ADS  Google Scholar 

  11. T. Tanaka, D. Fillmore, S.-T. Sun, I. Nishio, G. Swislow, A. Shah, Phys. Rev. Lett. 45, 1636 (1980)

    Article  ADS  Google Scholar 

  12. Z.-B. Hu, X.-M. Zhang, Y. Li, Science 269, 525 (1995)

    Article  ADS  Google Scholar 

  13. T. Tanaka, Phys. Rev. Lett. 40, 820 (1978)

    Article  ADS  Google Scholar 

  14. A. Matsumoto, S. Ikeda, A. Harada, K. Kataoka, Biomacromolecules 4, 1410 (2003)

    Article  Google Scholar 

  15. T. Miyata, N. Asami, T. Uragami, Nature 399, 766 (1999)

    Article  ADS  Google Scholar 

  16. R. Bashir, J.Z. Hilt, O. Elibol, A. Gupta, N.A. Peppas, Appl. Phys. Lett. 81, 3091 (2002)

    Article  ADS  Google Scholar 

  17. L. Dong, A.K. Agarwal, D.J. Beebe, H. Jiang, Nature 442, 551 (2006)

    Article  ADS  Google Scholar 

  18. D.J. Beebe, J.S. Moore, J.M. Bauer, Q. Yu, R.H. Liu, C. Devadoss, B.-Ho. Jo, Nature 404, 588 (2000)

    Article  ADS  Google Scholar 

  19. B.H. Cumpston, S.P. Ananthavel, S. Barlow, D.L. Dyer, J.E. Ehrlich, L.L. Erskine, A.A. Heikal, S.M. Kuebler, I.-Y.S. Lee, D. McCord-Maughton, J. Qin, H. Röckel, M. Rumi, X.-L. Wu, S.R. Marder, J.W. Perry, Nature 398, 51 (1999)

    Article  ADS  Google Scholar 

  20. S. Kawata, H.-B. Sun, T. Tanaka, K. Takada, Nature 412, 697 (2001)

    Article  ADS  Google Scholar 

  21. K. Takada, H.-B. Sun, S. Kawata, Appl. Phys. Lett. 86, 071122 (2005)

    Article  ADS  Google Scholar 

  22. D.-F. Tan, Y. Li, F.-J. Qi, H. Yang, Q.-H. Gong, X.-Z. Dong, X.-M. Duan, Appl. Phys. Lett. 90, 071106 (2007)

    Article  ADS  Google Scholar 

  23. J.-F. Xing, X.-Z. Dong, W.-Q. Chen, X.-M. Duan, N. Takeyasu, T. Tanaka, S. Kawata, Appl. Phys. Lett. 90, 131106 (2007)

    Article  ADS  Google Scholar 

  24. X.-Z. Dong, Z.-S. Zhao, X.-M. Duan, Appl. Phys. Lett. 91, 124103 (2007)

    Article  ADS  Google Scholar 

  25. X.-Z. Dong, Z.-S. Zhao, X.-M. Duan, Appl. Phys. Lett. 92, 091113 (2008)

    Article  ADS  Google Scholar 

  26. C.N. LaFratta, J.T. Fourkas, T. Baldacchini, R.A. Farrer, Angew. Chem. Int. Ed. 46, 6238 (2007)

    Article  Google Scholar 

  27. Z.-B. Sun, X.-Z. Dong, W.-Q. Chen, S. Nakanishi, X.-M. Duan, S. Kawata, Adv. Mater. 20, 914 (2008)

    Article  Google Scholar 

  28. T. Watanabe, M. Akiyama, K. Totani, S.M. Kuebler, F. Stellacci, W. Wenseleers, K. Braun, S.R. Marder, J.W. Perry, Adv. Funct. Mater. 12, 611 (2002)

    Article  Google Scholar 

  29. C.-F. Li, X.-Z. Dong, F. Jin, W. Jin, W.-Q. Chen, Z.-S. Zhao, X.-M. Duan, Appl. Phys. A 89, 145 (2007)

    Article  ADS  Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Corresponding author

Correspondence to Xuan-Ming Duan.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Xiong, Z., Dong, XZ., Chen, WQ. et al. Fast solvent-driven micropump fabricated by two-photon microfabrication. Appl. Phys. A 93, 447–452 (2008). https://doi.org/10.1007/s00339-008-4735-4

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s00339-008-4735-4

PACS

Navigation