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Replica molding of picosecond laser fabricated Si microstructures

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Abstract

This work demonstrates the fast generation and rapid replication of laser-fabricated three-dimensional conical microstructures on single-crystalline silicon. Large areas containing Si structures are fabricated by fast scanning of the focussed laser beam of a high-power, high repetition rate infrared picosecond laser system over the Si surface, in the presence of SF6. Furthermore, the possibility of replicating the initial spiked morphology on other materials is demonstrated by polydimethylsiloxane molding in vacuum. Results showing the successful transfer of the initial conical morphology on the photocurable resist material ORMOCER (an organically modified ceramic) are presented. The combination of laser-based methods and standard replication technology may open up interesting prospects for the fast and efficient transfer of three-dimensional patterns over a wide range of materials.

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Authors and Affiliations

  1. Laser Zentrum Hannover e.V., Hollerithallee 8, 30419, Hannover, Germany

    C. Reinhardt, S. Passinger & B.N. Chichkov

  2. Institute of Electronic Structure and Laser (IESL), Foundation for Research and Technology Hellas (FORTH), Vassilika Vouton, P.O. Box 1527, Heraklion, 71110, Greece

    V. Zorba & C. Fotakis

  3. Physics Department, University of Crete, Heraklion, 71003, Greece

    V. Zorba & C. Fotakis

Authors
  1. C. Reinhardt
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  2. S. Passinger
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  3. V. Zorba
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  4. B.N. Chichkov
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  5. C. Fotakis
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Corresponding author

Correspondence to C. Reinhardt.

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PACS

79.20.Ds; 81.20.Hy; 82.35.Lr

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Reinhardt, C., Passinger, S., Zorba, V. et al. Replica molding of picosecond laser fabricated Si microstructures. Appl. Phys. A 87, 673–677 (2007). https://doi.org/10.1007/s00339-007-3881-4

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  • DOI: https://doi.org/10.1007/s00339-007-3881-4

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