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Nanostructuring of surfaces by ultra-short laser pulses

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Abstract

Nanostructuring of an extended surface area is performed by ultra-short-pulse laser ablation in the low-fluence regime. A layer of micrometer-sized quartz spheres is used as a lens array in direct contact with the sample. The thickness of a transparent spacer layer under the spheres is adjusted so that the sample is struck by an array of well-focused spots. The threshold character of the ablation process allows the formation of sub-diffraction-limited structures, down to 500-nm holes with 800-nm light. The deposition of the lens array directly on the surface makes the technique broadly applicable, also to samples that show great variations in height.

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Authors and Affiliations

  1. Department of Physics and Astronomy, University of Aarhus, 8000, Aarhus C, Denmark

    K. Vestentoft, J.A. Olesen, B.H. Christensen & P. Balling

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  1. K. Vestentoft
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  2. J.A. Olesen
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  3. B.H. Christensen
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  4. P. Balling
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Corresponding author

Correspondence to P. Balling.

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PACS

61.80.Ba; 78.47.+p; 81.16.Rf; 81.65.Cf

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Vestentoft, K., Olesen, J., Christensen, B. et al. Nanostructuring of surfaces by ultra-short laser pulses. Appl. Phys. A 80, 493–496 (2005). https://doi.org/10.1007/s00339-004-3079-y

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  • DOI: https://doi.org/10.1007/s00339-004-3079-y

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