Abstract
Nanoimprint lithography (NIL) was carried out on precursor of polyimide (PI), poly(amic acid) film, and then hard baking to obtain imprinted PI film. The molecular aggregation states of imprinted PI films before and after hard baking were investigated by grazing-incidence wide-angle X-ray diffraction comparing with the one of flat PI film. It was found that NIL and hard baking can strongly affect the molecular aggregation states of PI film. Before hard baking, PI chain is aligned parallel to the line direction on the line. After hard baking, the alignment in ordered domain was changed to that the PI molecule of which chain axis is perpendicular to the line direction is significantly increased, while, PI molecule of which chain axis is parallel to the line direction is decreased after hard baking. Through comparing with the flat PI, crystallinity of imprinted PI film has been significantly enhanced.
Similar content being viewed by others
References
Friend RH, Zheng ZJ, Yim KH, Saifullah MSM, Welland ME, Kim JS, Huck WTS (2007) Uniaxial alignment of liquid-crystalline conjugated polymers by nanoconfinement. Nano Lett 7:987–992
Jonas AM et al (2005) Nanoscale control of polymer crystallization by nanoimprint lithography. Nano Lett 5:1738–1743
Hu WC, Aryal M, Trivedi K (2009) Nano-confinement induced chain alignment in ordered p3ht nanostructures defined by nanoimprint lithography. ACS Nano 3:3085–3090
Sroog CE (1976) Polyimides. J Polym Sci Macromol Rev D 11:161–208
Ree M (2006) High performance polyimides for applications in microelectronics and flat panel displays. Macromol Res 14:1–33
Seo DS, Kobayashi S, Nishikawa M (1992) Study of the pretilt angle for 5CB on rubbed polyimide films containing trifluoromethyl moiety and analysis of the Surface atomic concentration of f/c(percent) with an electron spectroscope for chemical-analysis. Appl Phys Lett 61:2392–2394
Vanaerle N, Barmentlo M, Hollering RWJ (1993) Effect of rubbing on the molecular-orientation within polyimide orienting layers of liquid crystal displays. J Appl Phys 74:3111–3120
Factor BJ, Russell TP, Toney MF (1993) Grazing incidence x-ray scattering studies of thin films of an aromatic polyimide. Macromolecules 26:2847–2859
Toney MF, Russell TP, Logan JA, Kikuchi H, Sands JM, Kumar SK (1995) Near-surface alignment of polymers in rubbed films. Nature 374:709–711
Factor BJ, Russell TP, Toney MF (1991) Surface-induced ordering of an aromatic polyimide. Phys Rev Lett 66:1181
Ando S, Takizawa K, Wakita J, Azami S (2011) Relationship between molecular aggregation structures and optical properties of polyimide films analyzed by synchrotron wide-angle X-ray diffraction, infrared absorption, and UV/Visible absorption spectroscopy at very high pressure. Macromolecules 44:349–359
Ando S, Takizawa K, Wakita J, Kakiage M, Masunaga H (2010) Molecular aggregation structures of polyimide films at very high pressure analyzed by Synchrotron wide-angle X-ray diffraction. Macromolecules 43:2115–2117
Stohr J, Samant MG, Luning J, Callegari AC, Chaudhari P, Doyle JP, Lacey JA, Lien SA, Purushothaman S, Speidell JL (2001) Liquid crystal alignment on carbonaceous surfaces with orientational order. Science 292:2299–2302
Chiou DR, Yeh KY, Chen LJ (2006) Adjustable pretilt angle of nematic 4-n-pentyl-4′-cyanobiphenyl on self-assembled monolayers formed from organosilanes on square-wave grating silica surfaces. Appl Phys Lett 88:133123
Chiou DR, Chen LJ, Lee CD (2006) Pretilt angle of liquid crystals and liquid-crystal alignment on microgrooved polyimide surfaces fabricated by soft embossing method. Langmuir 22:9403–9408
Yakabe H, Tanaka K, Nagamura T, Sasaki S, Sakata O, Takahara A, Kajiyama T (2005) Grazing incidence X-ray diffraction study on surface crystal structure of polyethylene thin films. Polym Bull 53:213–222
Honda K, Yakabe H, Koga T, Sasaki S, Sakata O, Otsuka H, Takahara A (2005) Molecular aggregation structure of poly(fluoroalkyl acrylate) thin films evaluated by synchrotron-sourced grazing-incidence X-ray diffraction. Chem Lett 34:1024–1025
Yamaguchi H, Kikuchi M, Kobayashi M, Ogawa H, Masunaga H, Sakata O, Takahara A (2012) Influence of molecular weight dispersity of poly{2-(perfluorooctyl)ethyl acrylate} brushes on their molecular aggregation states and wetting behavior. Macromolecules. 45:1509–1516
Wakita J, Jin S, Shin TJ, Ree M, Ando S (2010) Analysis of molecular aggregation structures of fully aromatic and semialiphatic polyimide films with synchrotron grazing incidence wide-angle X-ray scattering. Macromolecules 43:1930–1941
Ree M, Kim K, Woo SH, Chang H (1997) Structure, chain orientation, and properties in thin films of aromatic polyimides with various chain rigidities. J Appl Phys 81:698–708
Beck VA, Shaqfeh ESG (2007) Ergodicity-breaking and the unraveling dynamics of a polymer in linear and nonlinear extensional flows. J Rheol 51:561–574
Hlaing H, Lu XH, Hofmann T, Yager KG, Black CT, Ocko BM (2011) Nanoimprint-induced molecular orientation in semiconducting polymer nanostructures. ACS Nano 5:7532–7538
Acknowledgments
The synchrotron radiation X-ray diffraction experiments were performed at the BL13XU in the SPring-8 with the approval of JASRI (Proposal No. 2011A1485). This study was supported by a Grant-in-Aid for the Global COE Program “Science for Future Molecular Systems” from the Ministry of Education, Culture, Science, Sports and Technology of Japan.
Author information
Authors and Affiliations
Corresponding author
Rights and permissions
About this article
Cite this article
Siqing, S., Wu, H., Yamaguchi, H. et al. Grazing-incidence wide-angle X-ray diffraction study on molecular aggregation state of imprinted polyimide film before and after hard baking. Polym. Bull. 70, 105–115 (2013). https://doi.org/10.1007/s00289-012-0784-0
Received:
Revised:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s00289-012-0784-0