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Experimental study of electrophoretically assisted micro-ultrasonic machining

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Abstract

In micro-ultrasonic machining (MUSM), a major part of the material is removed by the impact of abrasive particles. In the early stage of machining, abrasive particles are distributed uniformly in the machining area. However, as the process goes on, abrasive particles will be driven out of the machining area owing to the ultrasonic vibration of the micro-tool or work-piece and the rotation of the micro-tool in the fluid. As a result, the machining precision and machining efficiency will be reduced. In this paper, we propose a new method called electrophoretically assisted micro-ultrasonic machining (EPAMUSM) in which an electric field is used to prevent the abrasive particles from being driven out of the machining area. Experiments on EPAMUSM are conducted using a self-developed micro-USM system with micro-tool vibration, in which the control system of the micro-USM machine tool controls the machining force in a constant range. First, experiments comparing micro-ultrasonic machining with and without electrophoretic assistance are conducted. It is found that, with the appropriate processing parameters, EPAMUSM can improve machining accuracy and machining efficiency. Then, experiments with an orthogonal design are performed to reveal the main effects of the process parameters (abrasive particle size, spindle speed, DC voltage, force, ultrasonic power, mass fraction, and feed rate) on the material removal rate, and the optimal processing parameters are derived from the results.

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References

  1. Alting L, Kimura F, Hansen HN, Bissacco G (2003) Micro engineering. CIRP Ann – Manuf Tech 52(2):635–657

    Article  Google Scholar 

  2. Ehmann KF, Bourell D, Culpepper ML, Hodgson TJ, Kurfess TR, Madou M, Rajurkar K, DeVor RE (2005) International assessment of Research and development in micromanufacturing. Word Technology Evaluation Center, Baltimore

    Google Scholar 

  3. Rajurkar KP, Levy G, Malshe A, Sundaram MM, McGeough J, Hu X, Resnick R, DeSilva A (2006) Micro and nano machining by electro-physical and chemical processes. CIRP Ann – Manuf Tech 55(2):643–666

    Article  Google Scholar 

  4. Chen K, Yao YL (2000) Process optimization in pulsed laser micromachining with applications in medical device manufacturing. Int J Adv Manuf Technol 16(4):243–249

    Article  MathSciNet  Google Scholar 

  5. Kibria G, Doloi B, Bhattacharyya B (2010) Experimental analysis on Nd:YAG laser micro-turning of alumina ceramic. Int J Adv Manuf Technol 50(5–8):643–650

    Article  Google Scholar 

  6. Ichida Y, Sato R, Morimoto Y, Kobayashi K (2005) Material removal mechanisms in non-contact ultrasonic abrasive machining. Wear 258:107–114

    Article  Google Scholar 

  7. Soundararajan VSV, Radhakrishnan V (1986) An experimental investigation on the basic mechanisms involved in ultrasonic machining. Int J Mach Tool Des Res 26(3):307–321

    Article  Google Scholar 

  8. Choi JP, Jeon BH, Kim BH (2007) Chemical-assisted ultrasonic machining of glass. J Mater Process Technol 191:153–156

    Article  Google Scholar 

  9. Egashira K, Taniguchi T, Tsuchiya H Miyazaki M (2004) Microultrasonic machining using multitools. In: Proceedings of the 7th International Conference on Progress Machining Technology (ICPMT04), pp 297–301

  10. Yu ZY, Rajurkar KP, Tandon A (2004) Study of 3D micro-ultrasonic machining. J Manuf Sci Eng 126(4):727–732

    Article  Google Scholar 

  11. Sun XQ, Masuzawa T, Fujino M (1996) Micro ultrasonic machining and its applications in MEMS. Sens Actuators A: Phys 57(2):159–164

    Article  Google Scholar 

  12. Boy JJ, Andrey E, Boulouize A, Khan-Malek C (2010) Developments in micro ultrasonic machining (MUSM) at FEMTO-ST. Int J Adv Manuf Technol 47(1–4):37–45

    Article  Google Scholar 

  13. Egashira K, Masuzawa T (1999) Microultrasonic machining by the application of work piece vibration. CIRP Ann – Manuf Tech 48(1):131–134

    Article  Google Scholar 

  14. Jain Vivek, Sharma A.K., Kumar Pradeep (2012) Investigations on tool wear in micro ultrasonic machining. Mechanical and Aerospace Engineering, Pts 1–7. W. Fan. 110–116: 1561–1566

  15. Zuyuan Y, Chunshi M, Chengming A, Jianzhong L, Dongming G (2012) Prediction of tool wear in micro USM. CIRP Ann – Manuf Tech 61(1):227–230

    Article  Google Scholar 

  16. Anupam V, Tao L, Yogesh G (2014) High resolution micro ultrasonic machining for trimming 3D microstructures. J Micromech Microeng 24(6):1–8

    Google Scholar 

  17. Zarepour H, Yeo SH (2012) Predictive modeling of material removal modes in micro ultrasonic machining. Int J Machine Tools Manuf 62:13–23

    Article  Google Scholar 

  18. Tateishi T, Shimada K, Yoshihara N, Yan JW, Kuriyagawa T (2009) Effect of electrorheological fluid assistance on micro ultrasonic machining. Adv Mater Res 69:148–152

    Article  Google Scholar 

  19. Tateishi T, Yoshihara N, Yan JW, Kuriyagawa T (2009) Fabrication of high-aspect ratio micro holes on hard brittle materials—study on electrorheological fluid-assisted micro ultrasonic machining. Key Eng Mater 389:264–270

    Article  Google Scholar 

  20. Tateishi T, Yoshihara N, Yan JW, Kuriyagawa T (2009) Study on electrorheological fluid-assisted micro ultrasonic machining. Int J Abrasive Technol 2(1):70–82

    Article  Google Scholar 

  21. Tateishi T, Shimada K, Yoshihara N, Yan JW, Kuriyagawa T (2009) Control of the behavior of abrasive grains by the effect of electrorheological fluid assistance—study on electrorheological fluid-assisted micro ultrasonic machining. Adv Mater Res 76:696–701

    Article  Google Scholar 

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Correspondence to Z. N. Guo.

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Lian, H.S., Guo, Z.N., Liu, J.W. et al. Experimental study of electrophoretically assisted micro-ultrasonic machining. Int J Adv Manuf Technol 85, 2115–2124 (2016). https://doi.org/10.1007/s00170-014-6666-x

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  • DOI: https://doi.org/10.1007/s00170-014-6666-x

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