Preparation of high T_c (Yb, Y)Ba₂Cu₃O₇-δ thin films by co-evaporation from effusion cells

Abstract

We have prepared superconducting thin films of (Yb,Y)Ba₂Cu₃O_7-δ by evaporation of copper, ytterbium or yttrium, and barium fluoride from Knudsen effusion cells. A simple two chamber vacuum system produced stable evaporation rates of 5–10 nm/min using various Knudsen cells without realtime feedback control. Excellent stoichiometry was obtained in the films by optimizing the deposition of Cu from a dual filament cell, Yb from a single filament cell and Y and BaF₂ from high temperature cells. Films were deposited mainly on SrTiO₃ substrates at temperatures ranging from 120 to 600° C and O₂ partial pressure up to 1.5 ⋻ 10⁻⁵ Torr. Post deposition anneals in O₂ and O₂ + H₂O produced films with room temperature resistivities as low as 227μΩ-cm andT _c (R = 0) at 91 K. Films were characterized using x-ray diffractometry, Rutherford backscattering spectrometry, energy dispersive x-ray analysis, scanning electron microscopy as well as electronic transport measurements.