Abstract
Barium strontium titanate (BST) (Ba1-x Sr x TiO3) thin films have been extensively used in many dielectric devices such as dynamic random access memories (DRAMs). To optimize its characteristics, a microstructural control is essential. In this paper, Ba0.6Sr0.4TiO3 thin film has been deposited on the SiO2/Si substrate by the pulsed laser deposition (PLD) technique at three different oxygen working pressures of 100, 220 and 350 mTorr. Then the deposited thin films at 100 mTorr oxygen pressure were annealed for 50 min in oxygen ambient at three different temperatures: 650, 720 and 800°C. The effect of oxygen working pressure during laser ablation and thermal treatment on the films was investigated by using X-ray diffraction (XRD), atomic force microscopy (AFM) and scanning electron microscopy (SEM) analysis methods. X-ray photoelectron spectroscopy analysis was used to determine the surface chemical composition of the samples. The results indicate that the deposited BST film at low working pressure (100 mTorr) in PLD chamber shows a lower surface roughness than other working pressures (220 and 350 mTorr). The as-deposited films show an amorphous structure and would turn into polycrystalline structure at annealing temperature above 650°C. Increase of temperature would cause the formation of cubic and perovskite phases, improvement in crystalline peaks and also result in the decomposition of BST at high temperature (above 800°C). In addition, rising of temperature leads to the increase in size of grains and clusters. Therefore more roughness was found at higher temperatures as a result of a more heterogeneous growth and less tensions.
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Wang Y Q, Liang W S, Petrov P K and Alford N M 2011 Mater. Charact. 62 294
Ahmad A, Goldthorpe I A and Khandani A K 2015 Appl. Phys. Lett. Rev. 2 011302
Remmel T, Gregory R and Baumert B 1999 International Centre for Diffraction Data
Kumar A, Manavalan S G, Gurumurthy V, Jeedigunta S and Weller T 2007 Mater. Sci. Eng. B 139 177
Padmini P, Taylor T R, Lefever M J, Nagra A S, York R A and Speck J S Appl. Phys. Lett. 75 3186
Saif A A and Poopalan P 2011 J. Mater. Sci. Technol. 27 802
Zhu H, Miao J, Noda M and Okuyama M 2004 Sens. Actuators A 110 371
Kocanda M, Mohiudin S F and Abdel-Motaleb L 2012 Cryst. Struct. Theory Appl. 1 17
Bäuerle D 2011 4th ed, Springer Publication, ISBN 978-3-642-17612-8
Horikawa T, Mikami N, Makita T, Tanimura J, Kataoka M, Kazunao S and Nunoshita M 1993 Jpn. J. Appl. Phys. 32 4130
Gao D, Xiao D, Bi J, Yu P, Yu G, Zhang W and Zhu J U 2003 Mater. Trans. 44 1320
Xing S, Song Z and Lin C 2002 Mater. Lett. 54 447
Jin H Z, Zhu J, Ehrhart P, Fitsilis F, Jia C L, Regnery S, Urban K and Waser R 2003 Thin Solid Films 429 282
Tang X G, Xiong H F, Jiang L L and Chan H L W 2005 J. Cryst. Growth 285 613
Xiaohong Z, Dongning Z, Wei P, Jianguo Z, Xiaowu Y, Jie L, Mingjian Z, Yingfei C, Haiyan T and Xiaoping X 2004 Mater. Lett. 58 3591
Saravanan K V and Raju K C J 2014 Mater. Res. Express 1 015706
Liao J X, Yang C R, Tian Z, Yang H G and Jin L 2006 J. Phys. D: Appl. Phys. 39 2473
Craciun V and Singh R K 2000 Appl. Phys. Lett. 76 14
Lee J H and Rhee S W 1999 J. Electrochem. Soc. 146 3783
Voigts F, Damjanovíc T, Borchardt G, Argirusis C and Friedrichs W M 2006 J. Nanomater. 63154 1
Joo J H, Seon J M, Jeon Y C, Oh K Y, Roh J S and Kim J J 1997 Appl. Phys. Lett. 70 3053
Tubchareon T, Soisuwan S, Ratanathammaphan S and Praserthdam P 2013 J. Lumin. 142 75
Tahmasebi N, Mahdavi S M and Irajizad A 2013 Appl. Surf. Sci. 273 261
Zhang X Y, Wang P, Xu F and Ong C K 2009 Solid-State Electron. 53 993
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SAROUKHANI, Z., TAHMASEBI, N., MAHDAVI, S.M. et al. Effect of working pressure and annealing temperature on microstructure and surface chemical composition of barium strontium titanate films grown by pulsed laser deposition. Bull Mater Sci 38, 1645–1650 (2015). https://doi.org/10.1007/s12034-015-0982-0
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DOI: https://doi.org/10.1007/s12034-015-0982-0