The photocatalytic activity of CVD grown films shows significant, non-linear (sigmoid-like) dependency on the film thickness. However, the photocatalytic activity of sol-gel grown film is almost independent of the film thickness. The specific surface area of sol-gel grown films is very small, regardless of the film thickness. Conversely, the specific surface area of CVD grown films indicates significant thickness dependency. The specific area and photocatalytic activity were found to show very similar dependencies on the film thickness.