Article

Optoelectronics Letters

, Volume 3, Issue 2, pp 81-84

First online:

A carbon nanotube-based sensing element

  • Yang Xing Affiliated withMEMS Lab., Department of Precision Instruments & Mechanology, Tsinghua UniversityState Key Lab. of Precision Measurement Technology and Instrumentation, Tsinghua UniversityMicro-nano technology research center, Tsinghua University
  • , Zhou Zhao-ying Affiliated withMEMS Lab., Department of Precision Instruments & Mechanology, Tsinghua UniversityState Key Lab. of Precision Measurement Technology and Instrumentation, Tsinghua UniversityMicro-nano technology research center, Tsinghua University
  • , Wu Ying Affiliated withMEMS Lab., Department of Precision Instruments & Mechanology, Tsinghua UniversityState Key Lab. of Precision Measurement Technology and Instrumentation, Tsinghua UniversityMicro-nano technology research center, Tsinghua University
  • , Zhang Jin Affiliated withDepartment of Chemistry, Peking University
  • , Zhang Ying-ying Affiliated withDepartment of Chemistry, Peking University

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Abstract

A carbon nanotube-based(CNT) sensing element is presented, which consists of substrate, insulating layer, electrodes, carbon nanotube and measuring circuit. The sensing components are a single or array of CNTs, which are located on the two electrodes. The CNT-based sensing element is fabricated by CVD (chemical vapor deposition)-direct-growth on micro-electrodes. The sensing model and measurement method of electromechanical property are also presented. Finally, the voltage-current characteristics are measured, which show that the CNT-based sensing element has good electrical properties.

CLC number

TP212.14