, Volume 3, Issue 2, pp 81-84

A carbon nanotube-based sensing element

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A carbon nanotube-based(CNT) sensing element is presented, which consists of substrate, insulating layer, electrodes, carbon nanotube and measuring circuit. The sensing components are a single or array of CNTs, which are located on the two electrodes. The CNT-based sensing element is fabricated by CVD (chemical vapor deposition)-direct-growth on micro-electrodes. The sensing model and measurement method of electromechanical property are also presented. Finally, the voltage-current characteristics are measured, which show that the CNT-based sensing element has good electrical properties.

Antrag GZ 398, Ghinesisch-Deutsches Zentrum f├╝r Wissenschaftsf├Ârderung.
This work is partially granted by National Natural Science Foundation of China (No.50505018), Specialized Research Fund for the Doctoral Program of Higher Education (No. 20030003024) and China Postdoctoral Science Foundation Grant (No. 2005038068).