Article

Journal of Electronic Materials

, Volume 40, Issue 8, pp 1647-1650

First online:

Optimization of Microlenses for InSb Infrared Focal-Plane Arrays

  • N. GuoAffiliated withNational Lab for Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences
  • , W. D. HuAffiliated withNational Lab for Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences Email author 
  • , X. S. ChenAffiliated withNational Lab for Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences
  • , C. MengAffiliated withLuoyang Optoelectronic Institute
  • , Y. Q. LvAffiliated withLuoyang Optoelectronic Institute
  • , W. LuAffiliated withNational Lab for Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences

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Abstract

In this work, three designs of spherical refractive microlenses have been investigated. The simulation results show that the response and crosstalk of photodetectors with silicon microlenses are one order of magnitude better than for photodetectors with InSb microlenses or silicon thin-film microlenses. Additionally, we determined the optimum position for the focused beam as a function of the radius of curvature of the microlenses. This optimum position is dependent only on the absorption characteristics of the InSb material.

Keywords

InSb infrared focal-plane arrays microlens radius of curvature response crosstalk