Journal of Electronic Materials

, Volume 40, Issue 8, pp 1647–1650

Optimization of Microlenses for InSb Infrared Focal-Plane Arrays

  • N. Guo
  • W. D. Hu
  • X. S. Chen
  • C. Meng
  • Y. Q. Lv
  • W. Lu
Article

DOI: 10.1007/s11664-011-1634-9

Cite this article as:
Guo, N., Hu, W.D., Chen, X.S. et al. Journal of Elec Materi (2011) 40: 1647. doi:10.1007/s11664-011-1634-9

Abstract

In this work, three designs of spherical refractive microlenses have been investigated. The simulation results show that the response and crosstalk of photodetectors with silicon microlenses are one order of magnitude better than for photodetectors with InSb microlenses or silicon thin-film microlenses. Additionally, we determined the optimum position for the focused beam as a function of the radius of curvature of the microlenses. This optimum position is dependent only on the absorption characteristics of the InSb material.

Keywords

InSb infrared focal-plane arraysmicrolensradius of curvatureresponsecrosstalk

Copyright information

© TMS 2011

Authors and Affiliations

  • N. Guo
    • 1
  • W. D. Hu
    • 1
  • X. S. Chen
    • 1
  • C. Meng
    • 2
  • Y. Q. Lv
    • 2
  • W. Lu
    • 1
  1. 1.National Lab for Infrared Physics, Shanghai Institute of Technical PhysicsChinese Academy of SciencesShanghaiChina
  2. 2.Luoyang Optoelectronic InstituteLuoyangChina