Nonvolatile Memories Using Quantum Dot (QD) Floating Gates Assembled on II–VI Tunnel Insulators
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- Suarez, E., Gogna, M., Al-Amoody, F. et al. Journal of Elec Materi (2010) 39: 903. doi:10.1007/s11664-010-1207-3
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This paper presents preliminary data on quantum dot gate nonvolatile memories using nearly lattice-matched ZnS/Zn0.95Mg0.05S/ZnS tunnel insulators. The GeOx-cladded Ge and SiOx-cladded Si quantum dots (QDs) are self-assembled site-specifically on the II–VI insulator grown epitaxially over the Si channel (formed between the source and drain region). The pseudomorphic II–VI stack serves both as a tunnel insulator and a high-κ dielectric. The effect of Mg incorporation in ZnMgS is also investigated. For the control gate insulator, we have used Si3N4 and SiO2 layers grown by plasma- enhanced chemical vapor deposition.