Thermal behavior of silver nanoparticles for low-temperature interconnect applications
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- Moon, K., Dong, H., Maric, R. et al. Journal of Elec Materi (2005) 34: 168. doi:10.1007/s11664-005-0229-8
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Low-temperature sintering behavior of Ag nanoparticles was investigated. The nano Ag particles used (∼20 nm) exhibited obvious sintering behavior at significantly lower temperatures (∼150°C) than the Tm (960°C) of silver. Coalescence of the nano Ag particles was observed by sintering the particles at 150°C, 200°C, and 250°C. The thermal profile of the nanoparticles was examined by a differential scanning calorimeter (DSC) and a thermogravimetric analyzer (TGA). Shrinkage of the Ag-nanoparticle compacts during the sintering process was observed by thermomechanical analysis (TMA). Sintering of the nanoparticle pellet led to a significant increase in density and electrical conductivity. The size of the sintered particles and the crystallite size of the particles increased with increasing sintering temperature.